1986
DOI: 10.1016/0039-6028(86)90252-9
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Chemical activity of the CC double bond on silicon surfaces

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Cited by 92 publications
(67 citation statements)
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“…Ethylene and propylene have been studied by several researchers. [21][22][23][24] These desorb, intact, between 550 and 580 K with some dissociation-2%-5% for monolayer ethylene 3 and 65% for monolayer propylene. For ethylene, two models have been proposed for the adsorption geometry, and both depend upon a di-bonded structure.…”
Section: -15mentioning
confidence: 99%
“…Ethylene and propylene have been studied by several researchers. [21][22][23][24] These desorb, intact, between 550 and 580 K with some dissociation-2%-5% for monolayer ethylene 3 and 65% for monolayer propylene. For ethylene, two models have been proposed for the adsorption geometry, and both depend upon a di-bonded structure.…”
Section: -15mentioning
confidence: 99%
“…11,12 It has been demonstrated that ethylene reacts with the silicon surface via the interaction between the C-C double bond and silicon dimers, producing two Si-C bonds ͑the so-called di-bonding͒. Other alkenes are found to react in a similar fashion with the Si͑100͒ surface, [13][14][15][16][17] i.e., they bind to the surface also via the di-bonding configuration. Besides simple alkenes, conjugated dienes such as 1,3-butadiene and 1,3-cyclohexadiene have been investigated.…”
Section: Introductionmentioning
confidence: 99%
“…However, for most studied hydrocarbons-silicon systems the C-C bond cleavage is not observed. For instance, unsaturated hydrocarbons, such as acetylene, ethylene or dienes, 4 nondissociatively chemisorb on the Si(100)-(2ϫ1) surface while molecules having only single C-C bonds, e.g., methane or propane, 13 do not adsorb at all. The reason for this lies on the fact the C-C bond cleavage may be prohibited by a high kinetic barrier.…”
Section: First Principles Modelingmentioning
confidence: 99%
“…shown that the r-bond in an unsaturated hydrocarbon is the active center for reaction of these molecules with a clean Si(100) surface [20]. In contrast, the saturated hydrocarbon molecules, containing only single bonds (a-bonds) between carbon atoms, do not react with the clean Si(100) surface at low temperatures [20].…”
mentioning
confidence: 99%
“…In contrast, the saturated hydrocarbon molecules, containing only single bonds (a-bonds) between carbon atoms, do not react with the clean Si(100) surface at low temperatures [20].…”
mentioning
confidence: 99%