1996
DOI: 10.1557/proc-442-687
|View full text |Cite
|
Sign up to set email alerts
|

Charge Transient Spectroscopy Study Of Deep Centers In Cvd Diamond And Diamond-Like Films

Abstract: The parameters of trapping centers in CVD diamond and Diamond-Like Carbon (DLC) films were studied by Charge Deep Level Transient Spectroscopy (Q-DLTS). The concentrations, activation energies, captures cross-section and location of the trapping centers were determined. The influence of post deposition heat treatment on the defect center parameters was studied. The Q-DLTS measurements showed that micro defects are acting as point trapping centers and have the continuous energy spectrum with one or two maximums… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

2
13
0

Year Published

2000
2000
2004
2004

Publication Types

Select...
5

Relationship

0
5

Authors

Journals

citations
Cited by 16 publications
(15 citation statements)
references
References 6 publications
2
13
0
Order By: Relevance
“…4a shows the change in detected charge as a function of time, for increasing device temperatures during constant optical excitation (at 240 nm) of an untreated device. The main peak in the figure shifts to the left, as expected for a typical Q-DLTS spectrum [14], as the temperature is increased in 10 K steps from 370 to 510 K (only a subset of the full curve-set is shown). Similar curve-sets were obtained for multiply treated devices.…”
Section: Resultssupporting
confidence: 52%
See 2 more Smart Citations
“…4a shows the change in detected charge as a function of time, for increasing device temperatures during constant optical excitation (at 240 nm) of an untreated device. The main peak in the figure shifts to the left, as expected for a typical Q-DLTS spectrum [14], as the temperature is increased in 10 K steps from 370 to 510 K (only a subset of the full curve-set is shown). Similar curve-sets were obtained for multiply treated devices.…”
Section: Resultssupporting
confidence: 52%
“…4a yield straight lines from which trap activation energies and cross sections can be calculated [14]. Figure 5 shows an example plotted from the data obtained for the untreated sample; a trap energy of %0.73 eV and cross section of %6.6 Â 10 ±17 cm ±2 can be determined.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The Q-DLTS technique is described in detail in Ref. 9. In the present work the trapped charge transient process is controlled after applying a voltage pulse of magnitude in the range 0.1 V to 10 V and duration from 10 6 to 10 s. The charge Q flowing through the circuit during the time period t D t 2 t 1 (Q-DLTS signal) is measured as a function of the pulse magnitude, temperature and rate window m D t 2 t 1 / ln t 2 /t 1 , where t 1 and t 2 are the times counted from the beginning of discharge.…”
Section: Charge-based Deep-level Transient Spectroscopymentioning
confidence: 99%
“…First, we explore impurity-induced defects and their density, capture crosssection and energy distribution in the diamond's forbidden bandgap. Charge-based deep-level transient spectroscopy (Q-DLTS) 9 is applied to study these properties. Next, we analyze transverse electrical conductivities, i.e.…”
Section: Introductionmentioning
confidence: 99%