Characterizing the Performance of a Resonance-Based MEMS Particle Sensor with Glass Beads

Choi, Ji-Seob; Noh, Jinhong; Choi, Hongsoo; Yoon, Yong-Jin; Park, Woo-Tae

doi:10.1007/s40684-023-00559-8

Int. J. of Precis. Eng. and Manuf.-Green Tech.

2023

DOI: 10.1007/s40684-023-00559-8

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Characterizing the Performance of a Resonance-Based MEMS Particle Sensor with Glass Beads

Ji-Seob Choi,

Jinhong Noh,

Hongsoo Choi

et al.

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Characterizing the Performance of a Resonance-Based MEMS Particle Sensor with Glass Beads

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References 14 publications

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