Characterizing interface structure between crystalline and ion bombarded silicon by transmission electron microscopy and molecular dynamics simulations

Rumyantsev, A. V.; Боргардт, Н. И.; Prikhodko, A. S.; Chaplygin, Yu. A.

doi:10.1016/j.apsusc.2020.148278

Cited by 4 publications

(2 citation statements)

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“…During FIB patterning, crystalline Si is converted to amorphous Si to a depth of several tens of nm. 21 To confirm that there is no tendency toward bubble formation in the HL regions (bare amorphous Si) and to better understand nanobubble formation at the molecular level on the stripes (OTS-Si), MD simulations were performed on HB/HL nanopatterned and amorphous Si surfaces (Figure 7). Amorphous Si substrates are designated "(100) amorphous" in Figure 7 based on the starting single-crystal orientation used to form the amorphous phase in the simulations.…”

Section: ■ Materials and Methodsmentioning

confidence: 99%

“…There are, however, several noteworthy drawbacks of FIB milling that directly impact its compatibility with surface nanobubble patterning. In the process of ion beam exposure, FIB milling creates myriad changes to the underlying substrate, including amorphization of Si (including up to ∼20 nm depth), Ga + ion implantation, and changes in surface roughness . Molecular dynamics (MD) simulations have demonstrated changes in water contact angle, in addition to nano-order deformation and hillock structure formation .…”

Section: Introductionmentioning

confidence: 99%

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Nanoscale Patterning of Surface Nanobubbles by Focused Ion Beam

Siddique,

Xie,

Horlacher

et al. 2024

Langmuir

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Surface nanobubbles forming on hydrophobic surfaces in water present an exciting opportunity as potential agents of top-down and bottom-up nanopatterning. The formation and characteristics of surface nanobubbles are strongly influenced by the physical and chemical properties of the substrate. In this study, focused ion beam (FIB) milling is used for the first time to spatially control the nucleation of surface nanobubbles with 75 nm precision. The spontaneous formation of nanobubbles on alternating lines of a self-assembled monolayer (octadecyltrichlorosilane) patterned by FIB is detected by atomic force microscopy. The effect of chemical vs topographical surface heterogeneity on the formation of nanobubbles is investigated by comparing samples with OTS coating applied pre-vs post-FIB patterning. The results confirm that nanoscale FIB-based patterning can effectively control surface nanobubble position by means of chemical heterogeneity. The effect of FIB milling on nanobubble morphology and properties, including contact angle and gas oversaturation, is also reported. Molecular dynamics simulations provide further insight into the effects of FIB amorphization on surface nanobubble formation. Combined experimental and simulation investigations offer insights to guide future nanobubble-based patterning using FIB milling.

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Section: ■ Materials and Methodsmentioning

confidence: 99%