Abstract:Al0.12GaN/GaN membrane-type photodetectors
(M-PD) were
separated from the Si substrates through a chemical lift-off process.
High photocurrent, low dark current, and high responsivity properties
were observed in the M-PD structure compared to that on the Si substrate.
Lattice-mismatch-induced tensile strain on the Al0.12GaN
layer was enlarged in the M-PD structure and was analyzed by the photoluminescence
and Raman spectra. From the simulation results, the energy band bending
induced the potential barrier heig… Show more
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