Characterization of ZnO thin films deposited on diamond-like carbon coated onto Si and SiO2/Si substrate

Effects of substrate temperature on sprayed ZnO thin films optical and morphological properties in terms of Amlouk–Boubaker opto-thermal expansivity ψAB

“…This feature was also discussed by Yang et al [12] who presented temperature-dependent structure alteration of the ZnO layers It is obvious that, according to the peak angles shifting towards both (0 0 2) and (1 0 1) orientations, which are characteristics to ZnO pillar crystal structures, the temperature effect results in a more transparent crystalline structure.…”

Sensitivity of ZnO Based NH₃ Sensor by RF Magnetron Sputtering

“…These nucleation site is as much as the deposition rate therefore the grain size shrink to form a small particle. On the other case, the already deposited particles obtain more kinetic energy as the RF power increases and thus causes the grain to get bigger [18]. The XRD spectra of ZnO deposited with various RF power is shown in Fig.…”

Influence of Post Annealing Temperature on the Properties of ZnO Films Prepared by RF Magnetron Sputtering

“…The density of the crystallographic defects including dislocations, interstitials and vacancies in the ZnO thin films also decrease rapidly with the increase of annealing temperature [12,13]. In order to study the dependence of the mean grain size on the post annealing temperature, we calculated the size of the crystal based on Scherrer equation [14]. The calculated crystal size is in the range of 30.5-32.8 nm.…”