Characterization of titanium silicide films formed by composite sputtering and rapid thermal annealing

TiSi2Ox Coated N-Doped Carbon Nanotubes as Pt Catalyst Support for the Oxygen Reduction Reaction in PEMFCs

“…The EDX analysis of these nanostructures (inset of Figure c) confirms the presence of Ti and Si with an approximate atomic ratio of 1:2. The oxygen was introduced into the deposited layer, as shown in the EDX spectrum through the residual oxygen in the chamber suggested in previous reports. − A closer observation of the composite nanostructures (Figure d) shows that the TiSi 2 O x coating has particle-like morphology, which is common during sputtering on nanostructured materials at room temperature. , …”

“…The HRTEM image of TiSi 2 O x -NCNT composite nanostructures (Figure d) illustrates their amorphous nature. The SAED pattern shows diffused rings (inset of Figure d), further confirming their amorphous nature …”

“…The SAED pattern shows diffused rings (inset of Figure 2d), further confirming their amorphous nature. 33 Compared to TiSi 2 O x -NCNTs, the TEM images of An-TiSi 2 O x -NCNTs (Figure 2e) indicate the enhanced coverage of TiSi 2 O x on NCNTs, confirming the diffusion of the coated layer under heat treatment. Furthermore, TEM images reveal the formation of nanoparticles in high density in the amorphous coating on NCNTs.…”

“…They showed that the growth of TiO 2 crystalline particles in the amorphous matrix is diffusion-limited and decreases with decreasing TiO 2 content. There also have been several reports on the formation of various nanocrystals such as Si 41 and metal silicides 33,34,42,43 in an amorphous matrix. Since these types of reactions are a diffusion-controlled process, in order to obtain a higher degree of crystallinity, longer annealing time and higher temperature are required.…”