Characterization of through-silicon vias using laser terahertz emission microscopy

How to use terahertz emission spectroscopy for wide bandgap semiconductor evaluation

“…However, for a large scale application such as in the field of semiconductor research and development, more simplified descriptions are needed to grab the picture of the physics at a glance of data and images. We have applied TES and LTEM to Si-based materials and devices and proven that one can estimate various parameters, such as surface potential, work function, impurity doping density, defects density in passivation layers, surface state density, and so on, semi-quantitatively and non-contactly by just observing the THz radiation [8][9][10][11][12][13][14][15][16][17]. In the present work, we review the TES and LTEM application to wide bandgap semiconductors [18][19][20][21][22][23][24].…”

Plasmonic Terahertz Devices and Sensors Based on Carbon Electronics

“…The intermolecular and intramolecular vibrational and rotational modes, including fingerprints of saccharides and pesticides, can be identified across the THz spectrum . To overcome the small scattering cross sections of analytes, microstructures, such as metamaterials (including metasurface, − absorber, and hybrid metamaterials , ) and photonic crystals, can be exploited to resonantly enhance the interactions between THz waves and analytes, − thereby improving the sensitivity to enable detection of trace amount of the material and/or molecule. ,, Metals, − dielectrics, and semiconducting materials , have all been utilized to fabricate such microstructures. Typically, once they are fabricated, their spectral responses are fixed unless materials with tunable properties [e.g., two-dimensional (2D) materials, semiconductors, and phase-change materials] are integrated and external stimuli are applied. , Tunable THz photonic microstructures are of great importance in chemical and biological sensing by facilitating spectral overlap between the microstructure resonances and analyte fingerprints.…”

“…4 To overcome the small scattering cross sections of analytes, 2 microstructures, such as metamaterials (including metasurface, 5−7 absorber, 8 and hybrid metamaterials 9,10 ) and photonic crystals, 11 can be exploited to resonantly enhance the interactions between THz waves and analytes, 12−14 thereby improving the sensitivity to enable detection of trace amount of the material and/or molecule. 2,6,15 Metals, 16−18 dielectrics, 19 and semiconducting materials 20,21 have all been utilized to fabricate such microstructures. Typically, once they are fabricated, their spectral responses are fixed unless materials with tunable properties [e.g., two-dimensional (2D) materials, semiconductors, and phase-change materials] 22 are integrated and external stimuli are applied.…”

First investigation of coherent terahertz radiation at a Super Tau Charm Factory

“…The Terahertz wave has, in particular, provided a method of terahertz atom probe microscopy, allowing new platform for microscopy with atomic spatial resolution. Compared to the ordinary microscopes, the THz circumvents the diffraction limit, even at these long wavelengths, the properties of materials can be probed on a nanometer scale [3,4]. THz technology is also widely used in biology and medicine [5], with significant advantages in nondestructive testing.…”