Characterization of thin polymer‐like films formed by plasma polymerization of methylmethacrylate: A neutron reflectivity study

Jeon, Hee Jung; Wyatt, J. R.; Harper‐Nixon, D.; Weinkauf, D. H.

doi:10.1002/polb.20131

Cited by 25 publications

(35 citation statements)

References 38 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Compared to plasma films deposited from MMA [6,8,11,12,37±39] based on FTIR results, the high-flow iCVD sample in this work exemplifies much more structural resemblance to conventional PMMA than the plasma samples. FTIR studies of plasma films have shown broadened peaks, [8,11,38] diminished C=O peaks, [8,39] and weakened C±O and C±H peaks.…”

Section: Resultsmentioning

confidence: 97%

Initiated CVD of Poly(methyl methacrylate) Thin Films

Chan

Gleason

2005

Chem. Vap. Deposition

View full text Add to dashboard Cite

Initiated CVD (iCVD), a dry method, is able to produce poly(methyl methacrylate) (PMMA) thin films by utilizing a reactive gaseous mixture of the monomer methyl methacrylate and the initiator triethylamine. The deposition rate is twenty times faster with the use of the initiator. Fourier-transform infrared (FTIR) spectroscopy and X-ray photoelectron spectroscopy (XPS) show high structural resemblance between iCVD PMMA and conventional PMMA, and the degree of functionality retention increases with decreasing residence time in the vacuum chamber. XPS detection of nitrogen incorporation is consistent with the incorporation of the initiator into the polymer chains. NMR spectroscopy on completely dissolved films shows that the tacticity of iCVD PMMA resembles that of conventional, radically polymerized PMMA. Altogether these observations support the hypothesis that, for iCVD PMMA, the polymerization is by a free-radical mechanism.

show abstract

Section: Resultsmentioning

confidence: 97%

Initiated CVD of Poly(methyl methacrylate) Thin Films

Chan

Gleason

2005

Chem. Vap. Deposition

View full text Add to dashboard Cite

show abstract

“…[2,3,6,15,16] These films also show very broad O-H stretching centered near 3400 cm -1 that, combined with the broad carbonyl peak, is more representative of poly(carboxylic acid) than PMMA. Conversion of the methoxy ester to carboxylic acid is possible via scission of the C-OCH 3 bond, creating a radical site which can then react with water in the deposition chamber or upon exposure to air to form the -COOH moiety.…”

Section: Ftir Spectroscopy To Determine the Optimal W/fmmentioning

confidence: 94%

“…[11] Thin films of PMMA have been created using spin-on, [1,12] laser-assisted vapor deposition, [13] and PECVD. [3][4][5][6][7]11,[14][15][16][17][18] Utilizing its clean and nearly complete thermal degradation, and its properties as an e-beam resist, PMMA has the potential to be a directly patternable sacrificial material for fabrication of closed cavity, air-gap structures which have applications in photonics and in semiconductor devices as an ultra low-k dielectric. This work examines the structure of films deposited under continuous wave (CW) and pulsed plasma-enhanced (PPE) CVD from MMA monomer under various processing conditions.…”

Section: Introductionmentioning

confidence: 99%

Effect of Substrate Temperature on the Plasma Polymerization of Poly(methyl methacrylate)

Casserly¹,

Gleason²

2006

Chemical Vapor Deposition

View full text Add to dashboard Cite

Low-power, plasma-enhanced (PE)CVD together with polymerization of methyl methacrylate (MMA) can be used to deposit thin films of poly(methyl methacrylate) (PMMA) with minimal loss of functional groups, as shown by Fourier transform infrared (FTIR) spectroscopy, X-ray photoelectron spectroscopy (XPS), and Raman spectrometry (RS). Retention of functional groups decreases with increased substrate temperature, corresponding to decreased deposition rates. From XPS data, the calculated percentage loss of functional groups ranges from 0.9 % to 43.4 %, changing as a function of deposition conditions. RS confirms the presence of C=C bonds in the polymer backbone as a result of scission of the ester group from MMA. The thermal properties of PECVD-produced films from MMA can be tailored by varying the substrate temperature. Onset of thermal decomposition increases with increased substrate temperature by eliminating thermally labile peroxide linkages in the polymer backbone, and by crosslinking that occurs at radical sites generated via scission of functional group bonds. The post-anneal thicknesses of the remaining polymer is of the order of 4 nm or less, indicating that low-power PECVD of PMMA is a viable candidate to act as a sacrificial material for air-gap fabrication.

show abstract

“…Conventional surface characterization techniques that are commonly employed in the field do not quantify the amount of hydrogen remaining in plasma polymer films after plasma polymer deposition. Reflectometry techniques are now becoming increasingly important in the characterization of these nano-scale interfaces [21][22][23][24]. X-ray reflectometry (XRR) is ideally suited to the study of the internal properties of layered film structures on surfaces, yielding data on sub-surface structure and material properties.…”

Section: Introductionmentioning

confidence: 99%

An X-ray and neutron reflectometry study of ‘PEG-like’ plasma polymer films

Menzies

Nelson

Shen

et al. 2011

J. R. Soc. Interface.

View full text Add to dashboard Cite

Plasma-enhanced chemical vapour-deposited films of di(ethylene glycol) dimethyl ether were analysed by a combination of X-ray photoelectron spectroscopy, atomic force microscopy, quartz crystal microbalance with dissipation monitoring (QCM-D), X-ray and neutron reflectometry (NR). The combination of these techniques enabled a systematic study of the impact of plasma deposition conditions upon resulting film chemistry (empirical formula), mass densities, structure and water solvation, which has been correlated with the films' efficacy against protein fouling. All films were shown to contain substantially less hydrogen than the original monomer and absorb a vast amount of water, which correlated with their mass density profiles. A proportion of the plasma polymer hydrogen atoms were shown to be exchangeable, while QCM-D measurements were inaccurate in detecting associated water in lower power films that contained loosely bound material. The higher protein resistance of the films deposited at a low load power was attributed to its greater chemical and structural similarity to that of poly(ethylene glycol) graft surfaces. These studies demonstrate the utility of using X-ray and NR analysis techniques in furthering the understanding of the chemistry of these films and their interaction with water and proteins.

show abstract

Characterization of thin polymer‐like films formed by plasma polymerization of methylmethacrylate: A neutron reflectivity study

Cited by 25 publications

References 38 publications

Initiated CVD of Poly(methyl methacrylate) Thin Films

Initiated CVD of Poly(methyl methacrylate) Thin Films

Effect of Substrate Temperature on the Plasma Polymerization of Poly(methyl methacrylate)

An X-ray and neutron reflectometry study of ‘PEG-like’ plasma polymer films

Contact Info

Product

Resources

About