2010
DOI: 10.1149/1.3306339
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Characterization of Thin-Film Lithium Batteries with Stable Thin-Film Li[sub 3]PO[sub 4] Solid Electrolytes Fabricated by ArF Excimer Laser Deposition

Abstract: High quality Li3PO4 thin films have been prepared by pulsed laser deposition (PLD) as a solid electrolyte for thin-film batteries. The structure, composition, ionic conductivity, and electrochemical stability of the Li3PO4 thin films have been characterized. The Li3PO4 film exhibits a single lithium-ion conductor with an ionic conductivity of 4.0×10−7Scm−1 at 25°C and an activation energy of 0.58 eV. The Li3PO4 film is electrochemically stable in the potential range from 0 to 4.7 V vs Li/Li+ . All… Show more

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Cited by 122 publications
(151 citation statements)
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“…For example, substituting a new layered-layered Li 2 MnO 3 * LiMO 2 cathode material for state-ofthe-art LiNi 0.8 Co 0. 15 Al 0.05 O 2 offers only 7% improvement in cathode energy density. 3 Furthermore, layered-layered materials with high Mn contents suffer from limit cycle life due to voltage and capacity fade.…”
mentioning
confidence: 99%
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“…For example, substituting a new layered-layered Li 2 MnO 3 * LiMO 2 cathode material for state-ofthe-art LiNi 0.8 Co 0. 15 Al 0.05 O 2 offers only 7% improvement in cathode energy density. 3 Furthermore, layered-layered materials with high Mn contents suffer from limit cycle life due to voltage and capacity fade.…”
mentioning
confidence: 99%
“…These coatings typically range between one nanometer and one micrometer in thickness. [14][15][16][17] Similar to passivation layers, these coatings should be durable and electronically insulating to block transfer of electrons. Unlike passivation layers, these coatings can be deposited at elevated temperatures from a variety of precursors, allowing for greater control of coating characteristics.…”
mentioning
confidence: 99%
“…Several strategies to improve the interface contact and to reduce the interface resistance have been proposed. For example, depositing a buffer layer by pulsed laser deposition (PLD) technique or atomic layer deposition (ALD) between solid electrolyte and electrodes, [19][20][21][22] preparing nanocomposites by a ball milling process 23,24 to reduce the particle size and increase the surface area and utilization of supercooled liquid of glass electrolyte. 25 Another common method to improve the contact area is simply applying high pressure throughout the fabrication process and electrochemical cycling.…”
mentioning
confidence: 99%
“…Li 3 PO 4 has been widely used by many commercial all-solid-state battery manufacturers due to the relatively high Li-ion conductivity and (electro)chemical stability with respect to metallic Li anodes [40]. Some methods have been described to deposit thin films of Li 3 PO 4 , including pulsed laser deposition [41,42], atomic layer deposition (ALD) [43], E-beam evaporation [44] and sputter deposition [45,46] . Figure 1(a) shows the deposition thickness of Li 3 PO 4 thin films as a function of time at different temperatures by MOCVD, using tert-butyllithium (t-BuLi) as Li-precursor and trimethyl phosphate(TMPO) as P-precursor [47].…”
Section: Solid-state Electrolytesmentioning
confidence: 99%