Characterization of thermally carbonized porous silicon humidity sensor

Björkqvist, M.; Salonen, Jarno; Paski, J.; Laine, E.

doi:10.1016/j.sna.2004.01.002

Cited by 114 publications

(62 citation statements)

References 14 publications

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“…Porous silicon can be easily obtained by electrochemical etching technology, and the pore geometry, the surface morphology, and the porosity of porous silicon can be very precisely controlled by the electrochemical etching conditions (Bisi et al, 2000;Schmuki et al, 2003). Porous silicon with several useful characteristics has already found applications in diverse fields such as solar cells (Bilyalov et al, 2003), RF (Park et al, 2001), (bio)chemical sensors (Massera et al, 2004;Björkqvist et al, 2004), etc.. Furthermore porous silicon with huge surface area as a kind of biocompatible solid support has been used to absorb enzyme, protein and other biologic molecules in fields of the enzyme micro reactors (Melander et al, 2005;Bengtsson et al, 2002), chromatography (Clicq et al, 2004), and antibody micro arrays (Steinhauer et al, 2005).…”

Section: Introductionmentioning

confidence: 99%

MEMS-Based Microdevice for Cell Lysis and DNA Extraction

Chen¹,

Cui²,

Cai³

et al. 2012

Microelectromechanical Systems and Devices

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Section: Introductionmentioning

confidence: 99%

MEMS-Based Microdevice for Cell Lysis and DNA Extraction

Chen¹,

Cui²,

Cai³

et al. 2012

Microelectromechanical Systems and Devices

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“…This method has shown its excellence, e.g., in humidity sensing applications [7]. Depending on the temperature used during the hydrocarbonization process, it is also possible to tune the hygroscopicity of the new surface inside the pores [8].…”

Section: Introductionmentioning

confidence: 99%

Detecting amine vapours with thermally carbonized porous silicon gas sensor

Björkqvist

Salonen

Tuura

et al. 2009

Phys. Status Solidi (c)

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A capacitive type porous silicon based gas sensor for detecting amine vapours has been developed. The sensor is highly sensitive, e.g., to methylamine and trimethylamine vapours, and its electrical parameters recover totally after exposure to studied gases. Thermal carbonization of porous silicon under acetylene atmosphere was carried out to produce stable and attractive surface to amine vapours. The sensor response to studied amine vapours can be separated from its response to humidity changes since their electrical responses act reversely. In addition to the vapours of methylamine/water and trimethylamine/water solutions, the sensor was also used to detect different amines, which are generated during spoilage of raw shrimps and Baltic herring fillets at room temperature. Fourier Transform Infrared spectroscopy was used to detect the amine vapours and other volatile compounds simultaneously with sensor measurements. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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“…can be easily obtained by electrochemical etching technology, and the pore size, surface morphology, and porosity of porous silicon were controlled by electrochemical etching conditions which mainly included current density, hydrofluoric (HF) concentration, and etching time. Many workers have evoked the potential application of porous silicon in diverse fields such as the development of light emitting devices (Kalem and Yavuzcetin 2000), insulator layer materials (Bisi et al 2000), solar cells (Bilyalov et al 2001), RF (Park and Lee 2003), chemical sensors (Massera et al 2004;Bjö rkqvist et al 2004), etc. Due to the technology for porous silicon fabrication compatible with standard microelectronic and MEMS techniques, porous silicon as a biocompatible solid supports has been used to immobilize enzyme, protein, and other biologic molecules for applications in the fields of enzyme microreactors (Melander et al 2005), chromatography (Clicq et al 2004), and antibody microarrays (Steinhauer et al 2005).…”

Section: Introductionmentioning

confidence: 99%

Fabrication of DNA purification microchip integrated with mesoporous matrix based on MEMS technology

et al. 2007

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This paper presents a novel microfabricated DNA purification microfluidic chip with enhanced performance based on the principle of micro solid phase extraction. The microchip comprises a layer of mesoporous material as solid phase matrix which is fabricated on the internal wall of the channel of microfluidic chip by electrochemical etching Si in an electrolyte. The conditions of electrochemical etching and porosity of the mesoporous matrix have been investigated. The properties of mesoporous matrix have been characterized by scanning electron microscopy and by BET (Brunauer, Emmet, and Teller) nitrogen adsorption analysis. The pore size of the mesoporous matrix is in the range of 10-30 nm, and the surface area is about 300 m 2 /g. Compared with the microfluidic chips with micropillar array matrix or non-porous matrix, the microchip with mesoporous matrix is able to extract enough polymerase chain reaction-amplifiable DNA from cultures of rat mesenchymal stem cells in 20 min. This highly efficient, effortless, and flexible technology can be used as a lab-on-a-chip component for initial biologic sample preparation.

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Characterization of thermally carbonized porous silicon humidity sensor

Cited by 114 publications

References 14 publications

MEMS-Based Microdevice for Cell Lysis and DNA Extraction

MEMS-Based Microdevice for Cell Lysis and DNA Extraction

Detecting amine vapours with thermally carbonized porous silicon gas sensor

Fabrication of DNA purification microchip integrated with mesoporous matrix based on MEMS technology

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