Characterization of the VO&lt;sub&gt;2&lt;/sub&gt; Thin Films Grown on Glass Substrates by MOD

Wada, Hideo; Fukawa, Taito; Toyota, Kazuaki; Koyama, Masatoshi; Hiroshiba, Nobuya; Koike, Kazuto

doi:10.1541/ieejfms.143.54

IEEJ Trans. FM

2023

DOI: 10.1541/ieejfms.143.54

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Characterization of the VO2 Thin Films Grown on Glass Substrates by MOD

Hideo Wada

Taito Fukawa

Kazuaki Toyota

et al.

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2024

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Low-Temperature Deposition of VO2 Thin Films on Glass Substrates by MOD Method

WADA,

FUKAWA,

HIROSHIBA

et al. 2024

J. Soc. Mat. Sci., Japan

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The metal-organic decomposition (MOD) method is a promising method for the deposition of VO2 thin films, which are expected to be used as material for smart window. However, a serious problem for such applications is that the minimum baking temperature in the previous study is 580°C under nitrogen (N2) atmosphere, which exceeds the softening point of soda glass of ~500°C. In this study, we successfully reduced the baking temperature to 450°C for forming polycrystalline VO2 thin films on glass substrates in N2 atmosphere added with 4% H2. When the transmittance of VO2 thin films between the visible and near-infrared regions around the phase transition temperature was measured with a spectrophotometer, maximum values of the average transmittance at 90℃ between 400 and 800 nm was 54.4% and the maximum dimming rate for transmittance change at 1600 nm was 36.8%. Furthermore, the substitutional doping of Nb ions effectively lowered the phase transition temperature from 68℃ to 49℃ at the baking temperature of 450°C.

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Low-Temperature Deposition of VO2 Thin Films on Glass Substrates by MOD Method

WADA,

FUKAWA,

HIROSHIBA

et al. 2024

J. Soc. Mat. Sci., Japan

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show abstract

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Characterization of the VO<sub>2</sub> Thin Films Grown on Glass Substrates by MOD

Cited by 1 publication

References 17 publications

Low-Temperature Deposition of VO<sub>2</sub> Thin Films on Glass Substrates by MOD Method

Low-Temperature Deposition of VO<sub>2</sub> Thin Films on Glass Substrates by MOD Method

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