SEI in coated Si thin film contain LiF-rich species. The transformation of AlF 3 to highly Li + ion conductive LiAlF phases (e.g., Li 3 AlF 6 ) was confirmed by utilizing IC-CD and is responsible for this enhancement in cycling performance. Further, this study suggests future directions to improve coating layer studies on Si anodes in future works, and help pave the way for developing high energy density LIB cells.