2017
DOI: 10.1007/s10765-017-2221-y
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Characterization of the Humidity Calibration Chamber by Numerical Simulations

Abstract: Atomic-layer-deposited alumina (ALD Al 2 O 3 ) can be utilized for passivation, structural, and functional purposes in electronics. In all cases, the deposited film is usually expected to maintain chemical stability over the lifetime of the device or during processing. However, as-deposited ALD Al 2 O 3 is typically amorphous with poor resistance to chemical attack by aggressive solutions employed in electronics manufacturing. Therefore, such films may not be suitable for further processing as solvent treatmen… Show more

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Cited by 4 publications
(4 citation statements)
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“…Interestingly, the adsorption/desorption of water molecules reached an equilibrium state faster at lower pressures. This was previously predicted based on a study using a numerical simulation [15]. The humidity measurement by the sensor at P t = 5 kPa shows a difference compared to the case of P t = 101 kPa by about 0.9%rh.…”
Section: Calibration Of Radiosonde Humidity Sensor At Varied Temperat...supporting
confidence: 61%
“…Interestingly, the adsorption/desorption of water molecules reached an equilibrium state faster at lower pressures. This was previously predicted based on a study using a numerical simulation [15]. The humidity measurement by the sensor at P t = 5 kPa shows a difference compared to the case of P t = 101 kPa by about 0.9%rh.…”
Section: Calibration Of Radiosonde Humidity Sensor At Varied Temperat...supporting
confidence: 61%
“…Interestingly, the adsorption/desorption difference of frostpoint temperature at 4.6 kPa is smaller than that at 20 kPa at low frost-point temperatures. This is possibly because the adsorption/desorption of water molecules on surfaces reaches an equilibrium state faster at lower pressures as previously studied using numerical simulations [18].…”
Section: Uncertainty Budgetmentioning
confidence: 70%
“…Then the structure, heating mode and heat transfer mode are analyzed. The heating condition is the heating of the heating film at the bottom of the metallic module and the temperature change is taken as the boundary condition, which is measured by the internal sensor of the thermostatic metal bath [13], [14]. The cloud of the 60 ℃ temperature field in a thermostatic metal bath is shown in Fig.…”
Section: Finite Element Analysis Of Temperature Field In a Thermostat...mentioning
confidence: 99%