Micro- And Opto-Electronic Materials and Structures: Physics, Mechanics, Design, Reliability, Packaging
DOI: 10.1007/0-387-32989-7_14
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Characterization of Stresses and Strains in Microelectronics and Photonics Devices Using Photomechanics Methods

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Cited by 4 publications
(4 citation statements)
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“…Thus, the deformation incurred by the temperature increment is locked into the grating and recorded at room temperature. Numerous examples can be found in the literature [20,21,[23][24][25][26][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41].…”
Section: Microelectronics Devicementioning
confidence: 99%
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“…Thus, the deformation incurred by the temperature increment is locked into the grating and recorded at room temperature. Numerous examples can be found in the literature [20,21,[23][24][25][26][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41].…”
Section: Microelectronics Devicementioning
confidence: 99%
“…La Porta et al [83] used microscopic moiré interferometry with the phase shifting technique to investigate the near-tip fields of a precracked stainless steel specimen under load. The approach proposed by Han and Post was combined with the O/DFM method to document the heterogeneous deformation of titanium in elastic tension [85], the fiber/matrix interactions in a unidirectional Boron/Aluminum metal-matrix composite [86], micromechanical thermal deformations of semiconductor packages and subassemblies [30,41] and the changes in microstrain across bonded dentin interfaces [87]. Figure 13 shows the microscopic displacement fields around two plated-through-holes (PTH), induced by ΔT of −80°C, where the contour interval is 104 nm/fringe [86].…”
Section: Micromechanicsmentioning
confidence: 99%
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“…The digital image analysis enhanced moire interferometry (DIAEMI), can obtain the in-situ out-of-plane displacements of the die, and stresses were calculated by a hybrid finite element method. But it is hard to print fine gratings on the surface of the specimen [5,6]. Moreover, the excess adhesive is critical since it could reinforce the specimen and change the local strain distribution.…”
Section: Introductionmentioning
confidence: 99%