Characterization of Stiction Accrual in a MEMS

Ranganathan, Ranjith; Sivakumar, G.; Gale, Richard; Dallas, Tim

doi:10.1109/jmems.2009.2027503

Cited by 4 publications

(2 citation statements)

References 12 publications

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“…It is well known that long beams and bigger plates are more prone to experience stiction [14,15]. The MEMS IWC, however, comprises lower small segments that are connected to other higher small segments, interchangeably, in a weave-like fashion.…”

Section: Reducing Stiction Effectsmentioning

confidence: 99%

Differential RF MEMS interwoven capacitor immune to residual stress warping

Elshurafa

Salama

2012

Micro Nano Lett.

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An RF MEMS capacitor with an interwoven structure is designed, fabricated in the PolyMUMPS process, and tested in an effort to address fabrication challenges usually faced in MEMS processes. The interwoven structure was found to offer several advantages over the typical MEMS parallel-plate design including eliminating the warping caused by residual stress, eliminating the need for etching holes, suppressing stiction, reducing parasitics, and providing differential capability.The quality factor of the proposed capacitor was higher than 5 throughout a 2GHz -10GHz range and the resonant frequency was in excess of 20GHz.

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Section: Reducing Stiction Effectsmentioning

confidence: 99%

Differential RF MEMS interwoven capacitor immune to residual stress warping

Elshurafa

Salama

2012

Micro Nano Lett.

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“…Anti-stiction coatings are one of the key technologies to ensure the reliability of microelectromechanical systems (MEMS) devices, [1][2][3][4][5][6][7][8][9][10][11][12][13] especially when the sizes of mechanically moving parts are reduced to the nanometer scale (known as NEMS). 14,15) It is also essential to reduce stiction forces during the demolding procedure in nanoimprint technology to achieve the accurate formation of fine patterns.…”

Section: Introductionmentioning

confidence: 99%

Atmospheric vapor phase deposition of nanometer-thick anti-stiction fluoropolymer coatings for silicon surfaces

Itoh

Takahashi

Morita

et al. 2016

Jpn. J. Appl. Phys.

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Anti-stiction coatings for silicon surfaces are a key technology to prevent the failure of nanoelectromechanical systems (NEMS) during operation and improve the forming accuracy in nanoimprint technology. In this study, we propose an atmospheric vapor phase deposition method to coat a silicon surface with fluoropolymers such as the perfluoropolyethers Fomblin Zdol 2000 and Zdol 4000. Thickness distributions, surface energies, coverages, and stiction forces for the deposited films were evaluated experimentally. The proposed method resulted in over 90% coverage with a film thickness of about 1 nm. The film thickness uniformity was around 0.1 nm over an area of 5 × 5 mm2. This coating effectively reduced the stiction forces by half compared with a bare silicon surface.

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