Characterization of Reactive Dissolution and Swelling of Polymer Films Using a Quartz Crystal Microbalance and Visible and Infrared Reflectance Spectroscopy

Abstract

Dissolution and swelling of thin films of ionizable polymers in contact with aqueous alkaline solutions are examined using a quartz crystal microbalance, while simultaneously recording the visible reflectivity and infrared absorption of the evolving films. From these data changes in the thickness, depth structure, composition, mass, and mechanical properties of the polymer film during its interaction with the aqueous solution can be detected. Analysis of these provides evidence for the formation of interfacial gel layers resulting from acid−base reaction of the polymer with the hydroxide solution and yields information on the kinetics of transport and chemical reaction that control the overall process. Kinetics simulations indicate that the most important factors influencing observed behaviors are the intrinsic reactivity of ionizable groups on the polymer and the response of the film's mechanical properties, which determine the ability of small molecules to move through it, to incorporation of water.

Photoresist Latent and Developer Images as Probed by Neutron Reflectivity Methods

“…[ 66 ] The bulk development of photoresist thin fi lms dissolve via reactive-dissolution kinetics. [67][68][69] In this process, summarized by Hinsberg et al, the chemical equilibrium (acid-base reaction) between weakly acidic polymer functional groups and the strong aqueous base induces a switch in solubility. The ionization of the polymer photoresists leads to a polyelectrolyte in the developer solution ( Figure 18b ).…”

Stimulus‐Responsive Polymers as Intelligent Coatings for Biosensors: Architectures, Response Mechanisms, and Applications

“…In general, the response kinetics depends on the polymer chain dynamics, the diffusivity of the analyte, and the kinetics of the chemical reactions within the polymer matrix. 126 As the primary response in most SRP -based transduction approaches is in the form of volumetric changes of the fi lm, the response kinetics can often be determined from the swelling kinetics. The thickness of the SRP coating has a strong infl uence on the swelling kinetics.…”

A Comprehensive Review of EUV Resist Materials and Processing at Selete

“…The characterization of the resist dissolution process after exposure has been continuously investigated in search for new ideas in the optimization of resist materials and processes [22][23] . Methods such as the quartz crystal microbalance (QCM) [24] and dissolution rate monitors [25] provide information that can help define the behavior of a resist film during the dissolution process.…”