Characterization of r.f.-sputtered zirconia coatings

The Influence of Oxide Color on the Surface Characteristics of Zirconium Alloy ZrNb7 (wt%) After Different Heat Treatments

“…This degradation of ZrO 2 into suboxides under argon bombardment is well reported in the literature (i.e., Iwamoto et. al [16]) and is visible on the surface of the white oxide, as a dark spot in the sputtered region, which is marked by a white arrow in Fig. 5a.…”

Effect of Heat Treatment on Ion Conductivity of Hydrated ZrO2 Thin Films Prepared by Reactive Sputtering Using H2O Gas

“…2) ZrO 2 thin films have been prepared by electron beam evaporation, 3,4) pulse laser deposition, 5) ionassisted deposition, 6) sol-gel processing, 7,8) metal-organic chemical vapor deposition, 9) and sputtering. 10,11) In recent years, sputtering techniques have been widely used to fabricate thin films, because it is superior in its ability to form large-area films with high productivity, and it is easy to control the stoichiometry of the deposited films. 12) Ion conductivities of hydrated ZrO 2 have been investigated, and England et al 13) reported an ion conductivity of 2 Â 10 À5 S/cm at room temperature for ZrO 2Á 1.75H 2 O powder prepared by a sol-gel technique.…”

Structural and Corrosive Properties of ZrO2Thin Films using N2O as a Reactive Gas by RF Reactive Magnetron Sputtering

“…서 론 ZrO 2 박막은 높은 광학적, 기계적, 화학적 특성으로 인 하여 광학, 기계 및 마이크로 전자공학 산업의 응용분야에 서 폭 넓게 사용되어지고 있다. 1,2) ZrO 2 박막은 Sol-Gel, 3) Metal Organic Chemical Vapor Deposition, 4) Electronbeam Evaporation, 5) Ion-beam-assisted deposition, 6) Atomic layer deposition, 7) Sputtering [8][9][10] 등의 다양한 증착법으로 사용되고 있다. 최근, ZrO 2 박막은 pressurized water reactor (PWR)의 fuel assembly의 피복관 재료인 Zircaloy-4 (Z-4)의 보호막으로 고려되어져 왔다.…”