1998
DOI: 10.1080/10584589808202069
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Characterization of PZT capacitors with SrRuO3 electrodes

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Cited by 22 publications
(9 citation statements)
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“…They proposed that Sr diffusion is related to the excess of Pb, with such a diffusion being responsible for the high leakage current in their capacitors. It is well known that Sr doping of PZT leads to a marked decrease in the magnitude of the polarization and could also degrade the physical properties such as the dielectric constant and Curie temperature [29,30]. This finding is critical as it provides a secondary explanation to the observed decrease in the switching polarization with decreasing thickness for Pb-based ferroelectric films [31].…”
Section: Methodsmentioning
confidence: 85%
“…They proposed that Sr diffusion is related to the excess of Pb, with such a diffusion being responsible for the high leakage current in their capacitors. It is well known that Sr doping of PZT leads to a marked decrease in the magnitude of the polarization and could also degrade the physical properties such as the dielectric constant and Curie temperature [29,30]. This finding is critical as it provides a secondary explanation to the observed decrease in the switching polarization with decreasing thickness for Pb-based ferroelectric films [31].…”
Section: Methodsmentioning
confidence: 85%
“…It is crucial to determine the failure mechanisms and attention has recently been focused on the ferroelectric filmelectrode interface as the source of this degradation behavior. The choice of appropriate electrode systems appears essential and numerous reports have shown that fatigue resistance can be significantly improved for PZT films by using oxide electrodes such as RuO 2 , 7 IrO 2 , 8,9 SrRuO 3 ͑SRO͒, 10 ͑La, Sr͒CoO 3 ͑LSCO͒, 11 YBa 2 Cu 3 O 7 ͑YBCO͒ 12 or hybrid electrodes incorporating conductive oxides. 13,14 Although some controversy still remains, the body of results available in the literature strongly suggests that space-charge accumulation plays a decisive role in fatigue.…”
Section: Introductionmentioning
confidence: 99%
“…9,10) It has been believed that the fatigue phenomenon is caused by the oxygen vacancy between the Pt bottom electrodes and the ferroelectric thin films. 11) Therefore, conductive oxide materials such as SRO, [12][13][14] LaNiO 3 (LNO), 15) and Nb-doped SrTiO 3 (Nb-STO) 16) films have been expected as bottom electrode materials for fabricating oxide ferroelectric thin films.…”
Section: Introductionmentioning
confidence: 99%