1994
DOI: 10.1063/1.358495
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Characterization of proton exchange lithium niobate waveguides

Abstract: Proton exchanged samples of LiNbO, have been profiled by micro-Raman spectroscopy, secondary ion mass spectroscopy, Rutherford backscattering channeling, and by x-ray diffraction (XRD). Following proton exchange (PE) there are two different phases in addition to pure LiNbO, detected by XRD. After successive annealing steps the outermost phase disappears and an interfacial region forms progressively between PE and LiNbO,. Specific vibrational bands are correlated to electro-optic and nonlinear optical propertie… Show more

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Cited by 48 publications
(29 citation statements)
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“…In practice, channel or ridge waveguides are more widely used than planar waveguides, such as switches, splitters and amplifiers, due to the stronger spatial confinement of light, reaching higher optical intensities within more compact scales [14,15]. There are many methods to fabricate waveguides, such as metal ion indiffusion, ion implantation, proton exchange, direct femtosecond laser writing or the combination of the above-mentioned methods [16][17][18][19]. The ion implantation technique is an excellent method for waveguide fabrication due to the controllable number, energy, temperature and range of the implanted ions.…”
Section: Introductionmentioning
confidence: 99%
“…In practice, channel or ridge waveguides are more widely used than planar waveguides, such as switches, splitters and amplifiers, due to the stronger spatial confinement of light, reaching higher optical intensities within more compact scales [14,15]. There are many methods to fabricate waveguides, such as metal ion indiffusion, ion implantation, proton exchange, direct femtosecond laser writing or the combination of the above-mentioned methods [16][17][18][19]. The ion implantation technique is an excellent method for waveguide fabrication due to the controllable number, energy, temperature and range of the implanted ions.…”
Section: Introductionmentioning
confidence: 99%
“…Titanium-diffused and proton-exchanged waveguides especially have been studied extensively using LiNbO 3 single-crystal substrates that have been grown from a nonstoichiometric harmonic composition melt by the Czochralski method. [1][2][3][4][5] Recently, the development of a processing method for highquality stoichiometric LiNbO 3 thin films has been receiving much attention for miniaturizing and integrating optical waveguide devices.…”
Section: Introductionmentioning
confidence: 99%
“…Titanium-diffused or proton-exchanged waveguides have been studied extensively using LiNbO 3 single-crystal substrates that were grown from a nonstoichiometric harmonic composition melt by the Czochralski method. [1][2][3][4][5] Recently, the development of processing methods for high-quality, stoichiometric LiNbO 3 thin films has been receiving much attention for miniaturizing and integrating optical waveguide devices.…”
Section: Introductionmentioning
confidence: 99%