Characterization of Polysilicon Strength through On-Chip Testing at MEMS Stoppers

Valle, Tiago Vicentini Ferreira do; Ghisi, Aldo; Masi, B. De; Mariani, Stefano; Rizzini, Francesco; Gattere, Gabriele; Valzasina, Carlo

doi:10.1109/eurosime56861.2023.10100798

2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and 2023

DOI: 10.1109/eurosime56861.2023.10100798

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Characterization of Polysilicon Strength through On-Chip Testing at MEMS Stoppers

Tiago Vicentini Ferreira do Valle

Aldo Ghisi

B. De Masi

et al.

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Characterization of Polysilicon Strength through On-Chip Testing at MEMS Stoppers

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References 15 publications

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