Characterization of nanostructured Fe/C multilayers by a pulsed cathodic arc

Abstract

Nano-multilayer have been deposited by a pulsed cathodic arc deposition with varying thicknesses of each layer less than 2 nm and examined by cross-sectional transmission electron microscopy (XTEM). Computer simulations are performed to get a better understanding of the deposition of nano-multilayer during deposition and compared with the XTEM results.