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2001
DOI: 10.1002/1521-4109(200103)13:3<204::aid-elan204>3.0.co;2-v
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Characterization of Nanoscaled Interdigitated Palladium Electrodes of Various Dimensions in KCl Solutions

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Cited by 17 publications
(11 citation statements)
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“…The e-beam fabrication of microscale IDAs with gaps ranging from 1 tm to 300 nm has been reported [1]. In another more recent work, nano-IDAs with electrode widths and spacings ranging from 550 nm down to 250 nm have been realized [2,3]. The latter approach was based on the e-beam lithography while the former combined e-beam lithography, isotropic etching and standard lithography.…”
Section: Introductionsupporting
confidence: 94%
See 1 more Smart Citation
“…The e-beam fabrication of microscale IDAs with gaps ranging from 1 tm to 300 nm has been reported [1]. In another more recent work, nano-IDAs with electrode widths and spacings ranging from 550 nm down to 250 nm have been realized [2,3]. The latter approach was based on the e-beam lithography while the former combined e-beam lithography, isotropic etching and standard lithography.…”
Section: Introductionsupporting
confidence: 94%
“…At high frequencies, a stray capacitance of the bottom Si3N4 passivation layer becomes predominant. These results agree well with the previously reported model [3].…”
Section: Technologysupporting
confidence: 85%
“…Such values are greater than previous reports which demonstrate approximately 0.4% active sites (Salinastorres et al, 2011). Thus, the porous nature of the VANTA IDEs significantly raises the electroactive surface area above a conventional solid or planar IDE sensor (Laureyn et al, 2001) and provides more carbon-carbon defects or active sites than conventional CNT electrodes (Banks et al, 2005(Banks et al, , 2004.…”
Section: Fabrication and Electrochemical Characterization Of Vanta Idementioning
confidence: 99%
“…To contribute to the advancement of this relevant and timely field of research, the present article is devoted to the extraction of an equivalent-circuit model and to the resonance-based investigation of the permittivity sensitivity, considering as case study a one-port coplanar interdigital capacitor (IDC) aimed at microfluidic broadband bioelectronics applications. Over the past few decades, interest in capacitors based on interdigital electrodes (IDE) has expanded from the traditional applications in communication systems [42] to the more recent ones in the biosensing field [12,30,37,[43][44][45][46]. Although a few studies have been reported on exploiting this resonance of the IDC structure for biosensing purpose [45], the biomaterial characterization is advantageous at relatively low frequencies to avoid the onset of IDC self-resonance effects [37].…”
Section: Introductionmentioning
confidence: 99%