1994
DOI: 10.1063/1.357352
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Characterization of nanocrystallites in porous p-type 6H-SiC

Abstract: We report the formation of porous p-type 6H-Sic. The existence of uniformly dispersed pores was confirmed by transmission electron microscopy, with interpore spacings in the range of l-10 nm. The porous film as a whole is a single crystal. Luminescence peaks above the normal band gap of 6H-SiC have been observed in the porous layer, but were not distinguished in the bulk Sic substrate. Quantum.confinement is discussed as a possible mechanism for the luminescence effects.

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Cited by 91 publications
(54 citation statements)
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“…Quantum confinement effect has also been demonstrated in other nanoscale SiC systems [9,10]. However, SiC quantum dots obtained by etching hexagonal SiC (6H-SiC) have yielded contradictory results on quantum confinement effects [11,12]. The observation of the quantum effects makes SiC nanostructures an even more interesting system because it suggests a possibility of designing SiC based materials with blue or higher frequency emission, e.g., UV.…”
mentioning
confidence: 98%
“…Quantum confinement effect has also been demonstrated in other nanoscale SiC systems [9,10]. However, SiC quantum dots obtained by etching hexagonal SiC (6H-SiC) have yielded contradictory results on quantum confinement effects [11,12]. The observation of the quantum effects makes SiC nanostructures an even more interesting system because it suggests a possibility of designing SiC based materials with blue or higher frequency emission, e.g., UV.…”
mentioning
confidence: 98%
“…In both cases the PL spectrum demonstrates a near-band-gap peak and a broad band of yellow luminescence. For anodized GaN layer, the near-band-gap peak experienced an %11 meV blue shift, which is not unusual for porous semiconductors [11], and a slight broadening. The peak also became weaker as related to the yellow luminescence band.…”
Section: Resultsmentioning
confidence: 99%
“…The large optical band gap: from 2.36 eV in 3C-SiC up to 3.33 eV in 2H-SiC, makes SiC NCs a good candidate for the blue and ultraviolet LEDs [3,4]. SiC-based homoepitaxial structures formed on the porous SiC substrate have been reported recently [5].…”
Section: Introductionmentioning
confidence: 98%