Characterization of MOCVD fluid dynamics by laser velocimetry

Johnson, Edward J.; Hyer, Paul; Culotta, P. W.; Black, L.; Clark, I. O.

doi:10.1016/0022-0248(91)90153-v

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Characterization of MOCVD fluid dynamics by laser velocimetry

Cited by 3 publications

References 11 publications

Flow field characterization in a vertically oriented cold wall CCVD reactor by particle image velocimetry

Flow field characterization in a vertically oriented cold wall CCVD reactor by particle image velocimetry

Evaluation of infrared thermography as a diagnostic tool in CVD applications

Microscopic and macroscopic modeling of layer growth kinetics and morphology in vapor deposition processing

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