Characterization of low pressure chemical vapor deposited polymeric fluorinated carbon m (C:FX)n thin films with low dielectric constant

Vibrational and Photoelectron Investigation of Amorphous Fluorinated Carbon Films

“…Carbon is the element with the greatest number of known allotropes that are radically different from one another, due to its coordination chemistry which is flexible in allowing pure sp 3 and sp 2 structures or continuous mixtures of sp 3 , sp 2 , and sp 1 hybridizations in one structure. Foreign species (hydrogen, halogens, nitrogen, etc.)…”

“…added to carbon allotropes can furthermore have a critical influence on the structures and properties of carbon-based materials, leading to a variety of one- to three-dimensional structures. In this respect fluorinated amorphous carbon (a-C:F) is one of the most promising materials for interlevel dielectric films due to its low dielectric constant (lower than silicon). − Most studies suggest wide potential applications of the a-C:F thin films due to the improvements achieved with respect to carbon films in the nonwetting and mechanical properties, , not far from those of polytetrafluoroethylene (PTFE). Partially or totally fluorinated carbon films have been produced in a variety of ways, from radio frequency plasma deposition to plasma enhanced or hot-wire chemical vapor deposition − and magnetron sputtering …”

Vapor Deposition of Fluoropolymer Surfaces

“…Ion Cyclotron Resonance Fourier Transform Mass-Spectrometry (ICR FT-MS) confirmed that the dominating bonding structure is -(CF 2 ) n -polymer chains, with a minor presence of oxygen and incorporated hydrocarbon fragments [28]. For high filament temperatures (>600 • C), the HFPO yielded films exhibiting some crosslinking -CF 2 -bonding configurations, while low substrate temperatures (−150 • C) increased the degree of oxygen incorporation in the form of C=O/COO and OH [29,30]. The HWCVD PTFE films can display a lower coefficient of friction (COF) than traditionally synthesized bulk PTFE [31].…”

Fabrication of PECVD-grown fluorinated hydrocarbon nanoparticles and circular nanoring arrays using nanosphere lithography

“…The strong absorption peak at approximately 1170 cm−1 is due to CF2 symmetric stretching bonds. The position of this peak was previously reported to be at 1153 cm−1 [27] and 1180 cm−1 [28]. A shoulder appearing at approximately 1265 cm−1 is due to the asymmetric vibration of the CF2 peak which was reported to be at 1253 cm−1 [26].…”

“…A shoulder appearing at approximately 1265 cm−1 is due to the asymmetric vibration of the CF2 peak which was reported to be at 1253 cm−1 [26]. (ii) The broad band centered at 1660 cm−1 is due to a C C stretching mode associated with the presence of HFC C< fragments in the fluorinated hydrocarbon films [27] and [29]. Finally, the band in the range of 2800-3100 cm−1 is assigned to the CHx bonds.…”