The effects of the immersion into a NH 3 aqueous solution on the structural characteristics of the chemically deposited Zn(S, O,OH) layer and photovoltaic performance of the CIGS/Zn(S,O,OH) solar cells were investigated with structural and electrical characterizations. The as-deposited-Zn(S,O,OH) layer possessed a layered structure of upper Zn(OH) 2 and Zn(S,O) layers, and the upper Zn(OH) 2 layer was removed by the immersion. The conversion efficiency for the CIGS solar cell was improved from 6.8% to 13.7% by removing the upper Zn(OH) 2 layer during the immersion.