Characterization of gas desorption from solid samples with small size by TDS.

A round-robin test of thermal desorption spectroscopy with quadrupole mass spectrometers calibrated by standard conductance element

“…The shapes of these spectra are comparable to those from the previous study [16], although a peak at 750°C due to outgassing from the vacuum chamber, is still observed in the result of participant C because of the incomplete subtraction. It is reasonable that the desorption temperature became higher in the order of participant A, C, and B because their ramp rates were faster in the same order when the recombination between hydrogen atoms or the diffusion of hydrogen atoms from bulk was assumed to be the rate limiting process of the hydrogen molecular desorption [1][2][3][4][5].…”

“…where S eff-i , p i , p i0 , V, and t is the effective pumping speed of the vacuum pump for gas species i, the partial pressure of gas species i, the background of the partial pressure of gas species i, the volume of the vacuum chamber, and time, respectively [1][2][3][4][5]. When S eff-i is selected so that the first term on the right-hand side is much larger than the second one, Eq.…”

“…Thermal desorption spectroscopy (TDS), which has developed in 1960s [1][2][3][4][5], is a widely used basic analytic technique for vacuum materials. For TDS analyses, a sample is heated with a constant ramp rate in the vacuum chamber.…”