Energetic photons (UV, VUV radiation and soft X rays), and particles (ions, electrons, metastable excited atoms) from inert gas plasmas possess sufficient energy to induce multiple bond scission reactions in the macromolecular chains of most polymers. As a result, volatile products of varying molecular weights escape from the polymers' surfaces; they can be captured and identified by mass spectrometry (MS). We report an MS-based study of five commercial polymers, polyethylene (PE), polypropylene (PP), polystyrene (PS), poly(ethylene terephthalate) (PET) and polyamide that were exposed to inert gas (He, Ar) plasmas and to near-monochromatic (l ¼ 121.6 nm) VUV irradiation. For the cases of PE and PP, quantitative analyses of the most abundant reaction products (H 2 , C 1 -C 7 alkanes) are compared among the various polymer/excitation-source cases, and with regard to literature data for g irradiation.