Characterization of Ga2O3 based MRISiC hydrogen gas sensors

Trinchi, Adrian; Kačiulis, S.; Pandolfi, L.; Ghantasala, Muralidhar K.; Li, Y.X.; Włodarski, W.; Viticoli, S.; Comini, Elisabetta; Sberveglieri, Giorgio

doi:10.1016/j.snb.2004.04.112

Cited by 59 publications

(29 citation statements)

References 9 publications

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“…The geometry of the samples was maintained identical to the MRISiC devices with a different oxide described previously. 4 The following samples were prepared and subsequently investigated:…”

Section: Methodsmentioning

confidence: 99%

XPS investigation of CoO_x‐based MRISiC structures for hydrocarbon gas sensing

Comini

Cusmà

Kačiulis

et al. 2006

Surface & Interface Analysis

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Sensors based on metal-reactive insulator-silicon carbide (MRISiC) devices are widely employed for monitoring industrial processes because of their resistance to harsh and high-temperature environments. MRISiC structures composed of the films of Pt and cobalt oxide (CoOx) were fabricated and investigated. The films of Pt and CoOx were deposited on SiC substrates by using r.f. magnetron sputtering. The depth profiles of their chemical composition were studied by XPS combined with cyclic Ar+ sputtering. The surface morphology was investigated by AFM. XPS analysis of the Co 2p peaks and shake-up satellites revealed the presence of the mixed-valency oxide Co3O4 on the sample surface, while deeper in the film only stoichiometric CoO was present. The platinum film deposited on the top of cobalt oxide was found to be metallic and uniform enough to inhibit further oxidation of Co2+. The hydrocarbon (propene) gas sensing performance of the Pt/CoOx/SiC devices was studied. Copyright (C) 2006 John Wiley & Sons, Ltd

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Section: Methodsmentioning

confidence: 99%

XPS investigation of CoO_x‐based MRISiC structures for hydrocarbon gas sensing

Comini

Cusmà

Kačiulis

et al. 2006

Surface & Interface Analysis

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“…Sensing toxic and flammable gases is a subject of growing importance in both domestic and industrial environments. Metal oxides such as Ga 2 O 3 , SnO 2 , WO 3 , TiO 2 , and ZnO [4][5][6][7][8][9] are stable physically and chemically and are widely investigated for gas and humidity detections. Sensing performance, especially response, is controlled by three independent factors: the receptor function, transducer function, and utility.…”

Section: Introductionmentioning

confidence: 99%

Nanocrystalline Metal Oxides for Methane Sensors: Role of Noble Metals

Basu

2009

Journal of Sensors

130

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Methane is an important gas for domestic and industrial applications and its source is mainly coalmines. Since methane is extremely inflammable in the coalmine atmosphere, it is essential to develop a reliable and relatively inexpensive chemical gas sensor to detect this inflammable gas below its explosion amount in air. The metal oxides have been proved to be potential materials for the development of commercial gas sensors. The functional properties of the metal oxide-based gas sensors can be improved not only by tailoring the crystal size of metal oxides but also by incorporating the noble metal catalyst on nanocrystalline metal oxide matrix. It was observed that the surface modification of nanocrystalline metal oxide thin films by noble metal sensitizers and the use of a noble metal catalytic contact as electrode reduce the operating temperatures appreciably and improve the sensing properties. This review article concentrates on the nanocrystalline metal oxide methane sensors and the role of noble metals on the sensing properties.

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“…The focus of sensor development concerns the investigation into new materials that provide increased sensitivity, selectivity and stability. Among them, metal oxide semiconductor devices with different materials are studied for hydrogen gas-sensing applications [9][10][11]. However, numerous efforts are still being directed to developing a high performance H 2 sensor [12][13][14].…”

Section: Introductionmentioning

confidence: 99%

A planar catalytic combustion sensor using nano-crystalline F-doped SnO2 as a supporting material for hydrogen detection

Han

Hong

Gwak

et al. 2007

Korean J. Chem. Eng.

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A planar catalytic combustion gas sensor based on Pd/Pt catalyst supported on F-doped SnO 2 nano-crystalline materials has been designed and fabricated for hydrogen detection. The sensor consists of platinum heaters on an alumina plate coated with a catalytic layer and compensating layer. This sensor exhibited better performance than that of the sensors employing sensing material of Pd/Pt catalyst on -Al 2 O 3 and of Pd/Pt catalyst on nano-crystalline SnO 2 . The detection limit of the sensor at 370 o C is in the concentration range of 0.5-5% (v/v), with an excellent linearity of signal voltage to the hydrogen gas concentration.

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Characterization of Ga2O3 based MRISiC hydrogen gas sensors

Cited by 59 publications

References 9 publications

XPS investigation of CoO_x‐based MRISiC structures for hydrocarbon gas sensing

XPS investigation of CoO_x‐based MRISiC structures for hydrocarbon gas sensing

Nanocrystalline Metal Oxides for Methane Sensors: Role of Noble Metals

A planar catalytic combustion sensor using nano-crystalline F-doped SnO2 as a supporting material for hydrogen detection

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Characterization of Ga2O3 based MRISiC hydrogen gas sensors

Cited by 59 publications

References 9 publications

XPS investigation of CoOx‐based MRISiC structures for hydrocarbon gas sensing

XPS investigation of CoOx‐based MRISiC structures for hydrocarbon gas sensing

Nanocrystalline Metal Oxides for Methane Sensors: Role of Noble Metals

A planar catalytic combustion sensor using nano-crystalline F-doped SnO2 as a supporting material for hydrogen detection

Contact Info

Product

Resources

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XPS investigation of CoO_x‐based MRISiC structures for hydrocarbon gas sensing

XPS investigation of CoO_x‐based MRISiC structures for hydrocarbon gas sensing