Characterization of FD SOI devices and VCO’s on thin dielectric membranes under pressure

Olbrechts, Benoit; Rue, Bertrand; Suski, J.; Flandre, Denis; Raskin, Jean‐Pierre

doi:10.1016/j.sse.2007.07.026

Cited by 15 publications

(15 citation statements)

References 28 publications

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“…Plates have various dimensions and number of layers. Details of manufacturing are defined in [18] and [35]. Below, a brief description of manufacturing process is given.…”

Section: A Device Fabricationmentioning

confidence: 99%

“…This residual stress is produced mainly by the thermal mismatching practically resulting from the deposition of different materials at different temperatures [15]- [17]. In [18], a membrane was manufactured of a weakly stressed quadruple stack. The plate is built of four different layers which are: silicon-on-insulator (SOI) buried oxide, low pressure chemical vapor deposited (LPCVD) nitride, densified plasma enhanced chemical vapor deposited (PECVD) silicon oxide and the devices oxide passivation layer.…”

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confidence: 99%

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Extraction Method for the Residual Stress in Multilayer Microplates Under Large Deflection Based on Static Deflection Analysis

Changizi

Stiharu

Olbrechts

et al. 2015

J. Microelectromech. Syst.

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This investigation presents a method of extraction of the built-in stress in films grown by thin-film deposition or growing in microplate structures. Although thin-film deposition processes are well controlled, the stress values might significantly vary, reaching ±40% of the projected value. The assumption of variance yields more accurate solutions for the deflection than the values obtained by assuming the exact interlaminar stress yielded by the deposition process. The extraction method was used in conjunction with a gradient-based optimization method to evaluate the effective stress based on the response of the microplate to distributed load. The estimation of the deflection in the model versus the experimental method is based on static deflection matching. The estimation of root-mean-square error based on the proposed model was reduced to 0.38% versus the experimental evaluation, while the deflection resulting from the assumption of the nominal interlaminar stress yield errors of up to 40% versus experiments.[2014-0220]Index Terms-Finite element methods, measurement errors, nonlinear differential equations, optimization methods, pressure measurement, Stone equation.

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“…Plates have various dimensions and number of layers. Details of manufacturing are defined in [18] and [35]. Below, a brief description of manufacturing process is given.…”

Section: A Device Fabricationmentioning

confidence: 99%

mentioning

confidence: 99%

Extraction Method for the Residual Stress in Multilayer Microplates Under Large Deflection Based on Static Deflection Analysis

Changizi

Stiharu

Olbrechts

et al. 2015

J. Microelectromech. Syst.

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“…The sensing mechanism of SnO 2 -based gas sensing materials has been discussed in many other papers [1, [6][7][8][9][10]. Briefly, the change in resistance is primarily caused by the adsorption and desorption of the gas molecules on the surface of the sensing structure.…”

Section: Figurementioning

confidence: 99%

“…The sensing performance is also based on the operating temperature, sensor structure, and material morphology. The interaction of these parameters is complex, and this makes it difficult to control or improve the semiconductor oxide-based gas sensors [8][9][10]. Recently, onedimensional (1D) semiconductor oxides have received considerable attention because of their controllable diameter, high density of surface sites, and large surface-to-volume ratios.…”

mentioning

confidence: 99%

Improved acetone sensing properties of flat sensors based on Co-SnO2 composite nanofibers

2011

Chin. Sci. Bull.

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Co-SnO 2 composite nanofibers were synthesized by an electrospinning method and characterized by X-ray diffraction, field emission scanning electron microscopy, and transmission electron microscopy. Gas sensors were fabricated by spinning these nanofibers onto flat ceramic substrates, which had signal electrodes and heaters on their top and bottom surfaces, respectively. Compared with sensors loaded with pure SnO 2 nanofibers, the Co-SnO 2 nanofiber sensors exhibited improved acetone sensing properties with high selectivity and rapid response and recovery times. The response was 33 when the sensors were exposed to 100 μL/L acetone at 330°C, and the corresponding response with 100 μL/L of ethanol was only 6. The response and recovery times to acetone were about 5 and 8 s, respectively. These results indicate Co-SnO 2 composite nanofibers are good candidates for fabrication of high performance acetone sensors for practical application. Establishing effective methods for monitoring and detecting toxic and flammable gases such as carbon monoxide, acetone, benzene and toluene is important because of the regulations that exist in many countries [1][2][3][4][5]. Although many modern monitoring methods, such as gas chromatography and infrared spectroscopy, have high sensitivity, they are expensive and cannot be used for real-time measurements. Recently, semiconductor oxide-based gas sensors have attracted attention because of their good reproducibility, compact size, ease of use, and low cost [6,7]. However, the response time of these sensors is difficult to improve and their selectivity is low. The main reason for these problems is that the sensing reaction of these sensors is based on chemisorbed oxygen species on the sensor surface, and it is difficult to manipulate these oxygen species for specific outcomes [1]. The sensing performance is also based on the operating temperature, sensor structure, and material morphology. The interaction of these parameters is complex, and this makes it difficult to control or improve the semiconductor oxide-based gas sensors [8][9][10]. Recently, onedimensional (1D) semiconductor oxides have received considerable attention because of their controllable diameter, high density of surface sites, and large surface-to-volume ratios. Many high performance gas sensors have been produced with rapid response/recovery times and high sensitivities [11][12][13]. Several Chinese groups have published a series of sensing results based on these 1D semiconductor oxides [12,13]. However, most of these sensors were fabricated by grinding the 1D semiconductor oxides into pastes and then coating the paste on the surface of ceramic tubes [7]. These processes would damage the morphology and structure of the oxides, and subsequently decrease the performance of the sensor. There have been few investigations on the selectivity of sensing with these sensors.

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“…ZnO, ethanol, micro-structure sensors, semiconducting metal oxides Gas sensors play an important role in environmental protecting, chemical process controlling and air quality monitoring as well as personal safety [1][2][3][4][5] . Many semiconducting metal oxides have been employed for this application due to their small size, low cost and high compatibility with microelectronic processing [6] .…”

mentioning

confidence: 99%

Micro-structure sensors based on ZnO microcrystals with contact-controlled ethanol sensing

Liu

Zhang

et al. 2009

Sci. Bull.

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Characterization of FD SOI devices and VCO’s on thin dielectric membranes under pressure

Cited by 15 publications

References 28 publications

Extraction Method for the Residual Stress in Multilayer Microplates Under Large Deflection Based on Static Deflection Analysis

Extraction Method for the Residual Stress in Multilayer Microplates Under Large Deflection Based on Static Deflection Analysis

Improved acetone sensing properties of flat sensors based on Co-SnO2 composite nanofibers

Micro-structure sensors based on ZnO microcrystals with contact-controlled ethanol sensing

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