Optical Interference Coatings Conference (OIC) 2022 2022
DOI: 10.1364/oic.2022.tha.5
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Characterization of Electron-beam Deposited TiO2/SiO2 Coatings Based on Multi-Sample Photometric and Ellipsometric Data

Abstract: A post-production characterization approach based on spectral photometric and ellipsometric data related to a specially developed set of samples is proposed. Reliability of the approach is demonstrated.

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