2014
DOI: 10.1007/s00170-014-6573-1
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Characterization of dimensional features of mesoscale component using capacitive sensor

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Cited by 6 publications
(2 citation statements)
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References 21 publications
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“…Yeong et al [20] used a profilometer and confocal microscope to profile rectangular microchannels in a falling film reactor. Murugarajan et al [21] employed a high-resolution noncontact capacitive sensor for characterizing mesoscale dimensional features. Li et al [22] were using revolved double laser beam to measure inner dimension and geometrical features of workpieces during manufacturing.…”
Section: Characterization Methodology Of Channel Geometrymentioning
confidence: 99%
“…Yeong et al [20] used a profilometer and confocal microscope to profile rectangular microchannels in a falling film reactor. Murugarajan et al [21] employed a high-resolution noncontact capacitive sensor for characterizing mesoscale dimensional features. Li et al [22] were using revolved double laser beam to measure inner dimension and geometrical features of workpieces during manufacturing.…”
Section: Characterization Methodology Of Channel Geometrymentioning
confidence: 99%
“…Several studies have been carried out around the use of capacitors in the manufacture of chemical sensors based on the field effect, searching more compact dimensional characteristics and more precise experimental resources [7][8][9]. Murugarajan and Samuel [10] used a high-resolution capacitive sensor for mesoscale dimensional characterization. A miniaturized experimental setup was developed using the high precision capacitive sensor and XYZ linear stage to perform the measurement.…”
Section: Introductionmentioning
confidence: 99%