Characterization of dielectric properties of polycrystalline aluminum nitride for high temperature wireless sensor nodes

Knaust, Stefan; Khaji, Zahra; Sturesson, Peter; Klintberg, Lena

doi:10.1088/1742-6596/476/1/012101

Cited by 1 publication

(1 citation statement)

References 12 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In addition, the commercial importance of AlN stems from its high thermal conductivity, and relatively low permittivity, which makes it enticing as a substrate material for microelectronic devices, especially suitable for wireless passive sensing applications [ 3 , 4 , 5 , 6 ]. The most accurate methods of measuring low loss dielectric materials are resonance methods employing cavity perturbation technique [ 7 , 8 , 9 ], surface acoustic wave devices [ 10 ] or Lamb wave resonators [ 11 ], and dielectric resonance technique [ 12 , 13 , 14 ], mainly based on post resonance, cylinder cavity resonance and waveguide reflection resonance.…”

Section: Introductionmentioning

confidence: 99%

High-Temperature Dielectric Properties of Aluminum Nitride Ceramic for Wireless Passive Sensing Applications

Liu

Yuan

Ren

et al. 2015

Sensors

View full text Add to dashboard Cite

The accurate characterization of the temperature-dependent permittivity of aluminum nitride (AlN) ceramic is quite critical to the application of wireless passive sensors for harsh environments. Since the change of the temperature-dependent permittivity will vary the ceramic-based capacitance, which can be converted into the change of the resonant frequency, an LC resonator, based on AlN ceramic, is prepared by the thick film technology. The dielectric properties of AlN ceramic are measured by the wireless coupling method, and discussed within the temperature range of 12 °C (room temperature) to 600 °C. The results show that the extracted relative permittivity of ceramic at room temperature is 2.3% higher than the nominal value of 9, and increases from 9.21 to 10.79, and the quality factor Q is decreased from 29.77 at room temperature to 3.61 at 600 °C within the temperature range.

show abstract