Characterization of Diamond Spherical Shell Thick Film by DC Plasma CVD

Abstract

Diamond spherical shell thick film was prepared by high power DC-plasma jet CVD. Atom force microscopy, scanning electron microscopy, Raman spectroscopy and roughness-profile-meter were used to characterize microstructure, morphology, impurities and orientation evolution of diamond spherical shell thick film. The results show that, when nucleation begins, grains grow random orientation. The grain size of spherical diamond film prepared is compact, clear, uniform, continuous and no remarkable bigger grain over the whole surface of film. On the growth surface, (100) facets were dominant, and the cross-section SEM indicated that film columnar spreading grew from the substrate surface to the diamond film surface. The roughness of the growth surface was much more than that of the nucleation surface. To adjust some important parameters as methane concentrate, depositing time, and matrix temperature, and high quality diamond spherical shell thick film was deposited.

Research of CBN Film and its Application Prospect on Cutting Tool

“…We will develop a new way of DC plasma jet CVD way to synthesis the cBN film. Our team has prepared thick diamond film with DC plasma jet CVD apparatus (figure 2) for many years [22] . The nontransferable plasma torch has a cylindrical anode and a cathode rod and the anode nozzle's diameter is between 1 and 3 mm.…”

“…The holder can be DC biased. The substrate's temperature is measured by infra-red temperature tester [22] . The experimental conditions fore the deposition of the cBN film are listed in table 3.…”

“…Table 3 cBN film deposition conditions [22] Chamber pressure/kpa 6. CBN coating deposition process will develop with three steps of the nucleation, growth and annealing.…”

Tribological and Grinding Properties of Spherical Diamond Grown on a Rough Discontinuous Surface

“…Currently, small spherical materials have been widely applied in many industrial fields, such as semiconductors, tribology and advanced catalysts [7][8][9]. Generally, the CVD diamond had a columnar shape with {111} crystalline face after a deposition time of several hours, while the spherical diamond grains commonly appeared at the initial stage of CVD deposition and only discretely distributed on the substrate surface at nanometric scale size [10]. Hence, it was significant to research the deposition process of large spherical diamond for the tribological applications of CVD diamond [11,12].…”

Growth and Characteristics of Freestanding Hemispherical Diamond Films by Microwave Plasma Chemical Vapor Deposition

“…Inevitably, the impurities of ferrous metal (Fe, Ni and Cr) would be introduced and consequently decreased the quality of products. Recently, Li et al [5,6] reported the synthesis of opaque spherical shell-shaped diamond films deposited on molybdenum (Mo) by dc-plasma jet CVD. As an important and effective deposition method, microwave plasma CVD (MPCVD) has been widely used to fabricate optical grade diamond films.…”