2016
DOI: 10.1016/j.spmi.2015.11.016
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Characterization of diamond-like carbon thin film synthesized by RF atmospheric pressure plasma Ar/CH4 jet

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Cited by 18 publications
(19 citation statements)
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“…To obtain information about radical generation, we measured the optical emission spectroscopy (OES) spectra of the discharges. Figure 4 shows a typical OES spectrum, in which un-ionized argon (Ar I), hydrogen (Balmer lines, H α at 656 nm, H β at 486 nm, and Hγ at 434 nm), hydrogen molecules (H 2 ), and CH* radicals (432.6 nm) are emitted from the discharge [24][25][26][27][28][29][30]. Figure 5 shows the pressure dependence of the emission intensity of CH* (432.6 nm).…”
Section: Resultsmentioning
confidence: 99%
“…To obtain information about radical generation, we measured the optical emission spectroscopy (OES) spectra of the discharges. Figure 4 shows a typical OES spectrum, in which un-ionized argon (Ar I), hydrogen (Balmer lines, H α at 656 nm, H β at 486 nm, and Hγ at 434 nm), hydrogen molecules (H 2 ), and CH* radicals (432.6 nm) are emitted from the discharge [24][25][26][27][28][29][30]. Figure 5 shows the pressure dependence of the emission intensity of CH* (432.6 nm).…”
Section: Resultsmentioning
confidence: 99%
“…Sohbatzadeh et al. [ 132 ] synthesized DLC thin films by a radio frequency atmospheric pressure plasma jet (RF‐APPJ) under a CH 4 /Ar atmosphere. The ratio of the intensity of the D:G Raman bands, I D / I G , was 0.47, revealing higher content of sp 3 hybridized carbon.…”
Section: Effect Of Discharge Gas On Cbmsmentioning
confidence: 99%
“…Raman spectroscopy is a technique widely used to characterize DLC coatings and other carbon-based mate rials 23,29 . This analysis allows evaluating chemical structure of the films, identify D and G band peak positions, determine I D / I G ratio, and the width of half of band G (FWHM(G)) a useful tool to correlate mechanical, adhesion, tribological, and corrosion behavior with the DLC coatings deposition conditions 23,30,31 .…”
Section: Characterizationmentioning
confidence: 99%