Characterization of argon fast atom beam source and its application to the fabrication of resonant tunneling diodes

Suhara, Michihiko; Matsuzaka, N.; Fukumitsu, M.; Okumura, Takahiro

doi:10.1109/imnc.2005.203773

Digest of Papers Microprocesses and Nanotechnology 2005 2005

DOI: 10.1109/imnc.2005.203773

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Characterization of argon fast atom beam source and its application to the fabrication of resonant tunneling diodes

Michihiko Suhara

N. Matsuzaka

M. Fukumitsu

et al.

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Characterization of argon fast atom beam source and its application to the fabrication of resonant tunneling diodes

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