Characterization of amorphous Pt/ZnO films grown on silicon(100) substrates by a photochemical metal organic deposition and their potential use as gas sensors

Buono-Core, G.E.; Klahn, A. Hugo; Cabello, G.; Lillo, Luis

doi:10.1016/j.poly.2013.06.028

Cited by 18 publications

(3 citation statements)

References 39 publications

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“…2,12,13,26,27 In addition, different methods, such as surface modication, addition of noble catalytic metal, doping and use of multi-compositional structures, have been applied to increase the sensitivity, response and recovery times of ZnO nanostructures. [28][29][30][31][32] In this regard, fabrication of composite structures using different materials in single or multiple layers could prove to be an effective way to enhance the sensing properties of ZnO based materials.…”

Section: Introductionmentioning

confidence: 99%

Reduced graphene oxide/ZnO nanocomposite for application in chemical gas sensors

et al. 2016

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Section: Introductionmentioning

confidence: 99%

Reduced graphene oxide/ZnO nanocomposite for application in chemical gas sensors

et al. 2016

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“…The CO gas sensing characteristics of ZnO-based sensors presented in table 12 show that the sensitivity obtained in this work is substantial compared with Al-doped ZnO and ZnO-based thin film sensors [46,47]. Thus, the results indicate maximum sensitivity of the thin film is achieved at 100 ppm CO gas at 150 • C; it is due to quick oxidation of gases.…”

Section: Data Meansmentioning

confidence: 63%

Optimization of RF sputtering process parameters on electrical resistivity, deposition rate and sensitivity of Al-doped ZnO thin films grown on Si substrate using grey-Taguchi technique

2019

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Increasing environmental pollution globally demands gas sensors for monitoring urban air quality, fire and exhaust from automobiles. The need for high performance gas sensors requires a good control over sensing material structure. This paper studies the suitability of Al-doped ZnO thin films for development of CO gas sensors. Deposition of Al-doped ZnO thin films on Si substrates by the radio frequency sputtering technique was carried out to study the influence of process parameters. The process parameters selected for the analysis were power, deposition time, substrate temperature and working pressure. An orthogonal array L16 (4 4), signal-to-noise ratio and analysis of variance (ANOVA) were performed to optimize the electrical resistivity, deposition rate and sensitivity of the thin films using the Taguchi method. Grey relational grade (GRG) was performed to obtain multiple-performance characteristics of the thin films by optimizing the process parameters. GRG analyses identified the process parameters: power 150 W, deposition time 35 min, substrate temperature 25 • C and working pressure 1.5 Pa showed optimal multiple-performance characteristics. ANOVA analyses indicate that power and substrate temperature show significant effect compared with other parameters. Thin films at the annealing temperature (450 • C) showed a decrease in electrical resistivity and an increase in sensitivity. At the sensor operating temperature of 150 • C, Al-doped thin films exhibited the lowest resistivity 3.76 × 10 −3-cm and the highest sensitivity of 59%. The optimal multiple-performance characteristic of thin film sample identified is found suitable for CO gas-sensing applications.

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“…remains a big challenge. Literature showed that the increase in the surface area the functionalization with noble metals and the doping of nanostructured ZnO have proven to be beneficial for the improvement of its sensitivity [13,22,[26][27][28][29][30][31][32].…”

Section: Introductionmentioning

confidence: 99%

Nanostructured ZnO chemical gas sensors

Galstyan

Comini

Baratto

et al. 2015

Ceramics International

206

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Characterization of amorphous Pt/ZnO films grown on silicon(100) substrates by a photochemical metal organic deposition and their potential use as gas sensors

Cited by 18 publications

References 39 publications

Reduced graphene oxide/ZnO nanocomposite for application in chemical gas sensors

Reduced graphene oxide/ZnO nanocomposite for application in chemical gas sensors

Optimization of RF sputtering process parameters on electrical resistivity, deposition rate and sensitivity of Al-doped ZnO thin films grown on Si substrate using grey-Taguchi technique

Nanostructured ZnO chemical gas sensors

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