Characterization of Al-Doped ZnO Thin Film Grown on Buffer Layer with RF Magnetron Sputtering Method

노영수,; 박동희,; 김태환,; 최지원,; 최원국,

doi:10.5757/jkvs.2009.18.3.213

Journal of the Korean Vacuum Society

2009

DOI: 10.5757/jkvs.2009.18.3.213

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Characterization of Al-Doped ZnO Thin Film Grown on Buffer Layer with RF Magnetron Sputtering Method

노영수 노영수¹,

박동희 박동희²,

김태환 김태환³

et al.

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Cited by 3 publications

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Structural and Optical Properties of ZnO/Glass Thin Films Grown by Radio-Frequency Magnetron Sputtering with a Powder Target

Sun¹,

Kang²

2009

Journal of the Korean Vacuum Society

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This paper reports the structural and optical properties of ZnO/glass thin films grown by radio-frequency magnetron sputtering with a powder target. In contrast to ZnO ceramic target typically used, a ZnO raw powder target was sputtered in this study. ZnO grew with the (0002) preferred orientation along the surface normal direction. Initially, the surface of ZnO thin films was flat considerably and then it became rougher as the thickness increased. The optical transmittance was as high as 88% in the range of 400-1000 nm. The bandgap energy of 3.23 eV at the 220 nm thick sample was estimated.

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Structural and Optical Properties of ZnO/Glass Thin Films Grown by Radio-Frequency Magnetron Sputtering with a Powder Target

Sun¹,

Kang²

2009

Journal of the Korean Vacuum Society

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Study of Low Reflectance and RF Frequency by Rie Surface Texture Process in Multi Crystall Silicon Solar Cells

윤명수¹,

현덕환²,

진법종³

et al. 2010

Journal of the Korean Vacuum Society

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Optical Properties of Al and Al₂O₃Coated ZnO Nanorods

신용호¹,

이수연²,

김용민³

2010

Journal of the Korean Vacuum Society

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Characterization of Al-Doped ZnO Thin Film Grown on Buffer Layer with RF Magnetron Sputtering Method

Cited by 3 publications

References 10 publications

Structural and Optical Properties of ZnO/Glass Thin Films Grown by Radio-Frequency Magnetron Sputtering with a Powder Target

Structural and Optical Properties of ZnO/Glass Thin Films Grown by Radio-Frequency Magnetron Sputtering with a Powder Target

Study of Low Reflectance and RF Frequency by Rie Surface Texture Process in Multi Crystall Silicon Solar Cells

Optical Properties of Al and Al₂O₃Coated ZnO Nanorods

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Characterization of Al-Doped ZnO Thin Film Grown on Buffer Layer with RF Magnetron Sputtering Method

Cited by 3 publications

References 10 publications

Structural and Optical Properties of ZnO/Glass Thin Films Grown by Radio-Frequency Magnetron Sputtering with a Powder Target

Structural and Optical Properties of ZnO/Glass Thin Films Grown by Radio-Frequency Magnetron Sputtering with a Powder Target

Study of Low Reflectance and RF Frequency by Rie Surface Texture Process in Multi Crystall Silicon Solar Cells

Optical Properties of Al and Al2O3Coated ZnO Nanorods

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Product

Resources

About

Optical Properties of Al and Al₂O₃Coated ZnO Nanorods