Characterization of a silicon-based shear-force sensor on human subjects

Wang, Lin; Beebe, David J.

doi:10.1109/tbme.2002.804586

Cited by 18 publications

(2 citation statements)

References 22 publications

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“…It is worth mentioning that polymer-based sensors are dependent on the operating voltage [6,7,8,9], which is different from silicon-based sensing solution. A silicon-based shear stress sensor based on diaphragm sensor structure was developed by Wang and Beebe [10,11]. Four ion-implanted resistors are embedded in the diaphragm structure which is similar to a standard diaphragm pressure sensor.…”

Section: Introductionmentioning

confidence: 99%

Modelling and Design of MEMS Piezoresistive Out-of-Plane Shear and Normal Stress Sensors

Zhang

2018

Sensors

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In this paper, the design of MEMS piezoresistive out-of-plane shear and normal stress sensor is described. To improve the sensor sensitivity, a methodology by the incorporation of stress concentration regions, namely surface trenches in the proximity of sensing elements was explored in detail. The finite element (FE) model, verified by a five-layer analytical model was developed as a tool to model the performance of the sensor and guide the geometric optimization of the surface trenches. Optimum location and dimensions of the surface trenches have been obtained through a comprehensive FE analysis. The microfabrication and packing scheme was introduced to prototype the sensor with optimum geometric characteristics of surface trenches. Signal output from the prototyped sensor was tested and compared with those from FE simulation. Good agreement has been achieved between the simulation and experimental results. Moreover, the results suggest the incorporation of surface trenches can help improve the sensor sensitivity. More specifically, the sum of signal output from the sensor chip with surface trenches are 4.52, 5.06 and 5.72 times higher compared to flat sensor chip for center sensing area, edge sensing areas 1 and 2, respectively.

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Section: Introductionmentioning

confidence: 99%

Modelling and Design of MEMS Piezoresistive Out-of-Plane Shear and Normal Stress Sensors

Zhang

2018

Sensors

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“…In research related to a tactile sensor, a flexible, thin, and small sensor for detecting three DOF (normal force and shear forces) has been developed by micromachining technology. Wang et al developed a silicon sensor using four piezoresistors [10]. The forces were calculated by the combination of several piezoresistors.…”

Section: Introductionmentioning

confidence: 99%

Feasibility of novel four degrees of freedom capacitive force sensor for skin interface force

Murakami

Ishikuro

Takahashi

2012

BioMedical Engineering OnLine

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BackgroundThe objective of our study was to develop a novel capacitive force sensor that enables simultaneous measurements of yaw torque around the pressure axis and normal force and shear forces at a single point for the purpose of elucidating pressure ulcer pathogenesis and establishing criteria for selection of cushions and mattresses.MethodsTwo newly developed sensors (approximately 10 mm×10 mm×5 mm (10) and 20 mm×20 mm×5 mm (20)) were constructed from silicone gel and four upper and lower electrodes. The upper and lower electrodes had sixteen combinations that had the function as capacitors of parallel plate type. The full scale (FS) ranges of force/torque were defined as 0–1.5 N, –0.5-0.5 N and −1.5-1.5 N mm (10) and 0–8.7 N, –2.9-2.9 N and −16.8-16.8 N mm (20) in normal force, shear forces and yaw torque, respectively. The capacitances of sixteen capacitors were measured by an LCR meter (AC1V, 100 kHz) when displacements corresponding to four degrees of freedom (DOF) forces within FS ranges were applied to the sensor. The measurement was repeated three times in each displacement condition (10 only). Force/torque were calculated by corrected capacitance and were evaluated by comparison to theoretical values and standard normal force measured by an universal tester.ResultsIn measurements of capacitance, the coefficient of variation was 3.23% (10). The Maximum FS errors of estimated force/torque were less than or equal to 10.1 (10) and 16.4% (20), respectively. The standard normal forces were approximately 1.5 (10) and 9.4 N (20) when pressure displacements were 3 (10) and 2 mm (20), respectively. The estimated normal forces were approximately 1.5 (10) and 8.6 N (10) in the same condition.ConclusionsIn this study, we developed a new four DOF force sensor for measurement of force/torque that occur between the skin and a mattress. In measurement of capacitance, the repeatability was good and it was confirmed that the sensor had characteristics that enabled the correction by linear approximation for adjustment of gain and offset. In estimation of forces/torque, we considered accuracy to be within an acceptable range.

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Integrated proximity, contact and force sensing using elastomer-embedded commodity proximity sensors

2018

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Characterization of a silicon-based shear-force sensor on human subjects

Cited by 18 publications

References 22 publications

Modelling and Design of MEMS Piezoresistive Out-of-Plane Shear and Normal Stress Sensors

Modelling and Design of MEMS Piezoresistive Out-of-Plane Shear and Normal Stress Sensors

Feasibility of novel four degrees of freedom capacitive force sensor for skin interface force

Integrated proximity, contact and force sensing using elastomer-embedded commodity proximity sensors

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