2002
DOI: 10.1109/tbme.2002.804586
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Characterization of a silicon-based shear-force sensor on human subjects

Abstract: Abstract-A silicon sensor is developed and its ability to measure both compressive and shear forces at the skin-object interface is characterized. The sensor is designed based on the piezoresistive effect and fabricated using integrated circuit and microelectromechanical systems technologies. The sensor utilizes a mesa structure that leads to asymmetric diaphragm deformations in response to nonnormal loading. Four independent ion-implanted piezoresistors are used to detect the stresses induced in diaphragm and… Show more

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Cited by 18 publications
(2 citation statements)
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“…It is worth mentioning that polymer-based sensors are dependent on the operating voltage [6,7,8,9], which is different from silicon-based sensing solution. A silicon-based shear stress sensor based on diaphragm sensor structure was developed by Wang and Beebe [10,11]. Four ion-implanted resistors are embedded in the diaphragm structure which is similar to a standard diaphragm pressure sensor.…”
Section: Introductionmentioning
confidence: 99%
“…It is worth mentioning that polymer-based sensors are dependent on the operating voltage [6,7,8,9], which is different from silicon-based sensing solution. A silicon-based shear stress sensor based on diaphragm sensor structure was developed by Wang and Beebe [10,11]. Four ion-implanted resistors are embedded in the diaphragm structure which is similar to a standard diaphragm pressure sensor.…”
Section: Introductionmentioning
confidence: 99%
“…In research related to a tactile sensor, a flexible, thin, and small sensor for detecting three DOF (normal force and shear forces) has been developed by micromachining technology. Wang et al developed a silicon sensor using four piezoresistors [10]. The forces were calculated by the combination of several piezoresistors.…”
Section: Introductionmentioning
confidence: 99%