2021
DOI: 10.1063/5.0056124
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Characterization of a radio-frequency inductively coupled electrothermal plasma thruster

Abstract: A radio-frequency (RF) inductively coupled electrothermal plasma thruster operating with argon is experimentally characterized for different mass flow rates, RF powers, and propellant injection configurations. Depending on the propellant mass flow rate, significant neutral gas heating is observed with effective stagnation temperatures around 2000 K (giving a maximum estimated thrust and specific impulse of about 100 mN and 125 s, respectively) for absorbed powers between 300 and 500 W. A self-consistent theore… Show more

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Cited by 10 publications
(21 citation statements)
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“…The forward vortex plasma eventually extinguishes at a mass flow rate of 170 mg s −1 . Other conventional gas injection configurations, such as single or double flux axial injection at the upstream end of the torch, have been previously studied and found to produce similar stagnation temperatures as the forward vortex [53]. By contrast, the stagnation temperature with the reverse vortex continues to increase for mass flow rates above 80 mg s −1 , reaching approximately 3200 K at 155 mg s −1 before the plasma extinguishes.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The forward vortex plasma eventually extinguishes at a mass flow rate of 170 mg s −1 . Other conventional gas injection configurations, such as single or double flux axial injection at the upstream end of the torch, have been previously studied and found to produce similar stagnation temperatures as the forward vortex [53]. By contrast, the stagnation temperature with the reverse vortex continues to increase for mass flow rates above 80 mg s −1 , reaching approximately 3200 K at 155 mg s −1 before the plasma extinguishes.…”
Section: Resultsmentioning
confidence: 99%
“…Thus, the ratio of the hot-to-cold stagnation temperature is proportional to the square of the hot-to-cold pressure ratio. Thermocouple measurements give T s,cold of approximately 20 • C. Note that the gas stagnation temperature is an effective average temperature within the torch (and a more appropriate value to use when estimating some torch performance metrics), whereas the actual maximum gas temperature (which typically peaks on, or close to, the torch central axis) is expected to be about 3 times higher [53]. Once the stagnation temperature is determined from equation ( 2), the enthalpy flow and thermal efficiency of the plasma torch can be estimated from…”
Section: Diagnosticsmentioning
confidence: 99%
“…for plasma etching, sputtering, and chemical vapor deposition, [1][2][3][4][5] where a uniform density profile is required when processing a large diameter substrate. The RF plasma sources have also been vigorously investigated for the development of space electric propulsion devices such as an ICP plasma thruster, 6) a gridded ion thruster based on the RF plasma source, 7) and a magnetic nozzle (MN) RF plasma thruster (sometimes called a helicon thruster). [8][9][10][11] The MN RF plasma thruster typically consists of the RF plasma source and the MN; the plasma produced and energized in the source is transported along the magnetic field lines and expands along the MN.…”
Section: Introductionmentioning
confidence: 99%
“…Inductively-coupled plasma (ICP) discharges were first discovered more than a century ago [1][2][3][4], and the technology has been extensively-developed for a range of applications from light sources [5] to plasma propulsion [6], but in particular it is utilized within the semiconductor manufacturing industry for plasma-aided fabrication of integrated circuits [7,8]. In an ICP, large volume plasmas are generated as energy is coupled into an ionized gas from a radio-frequency (RF) power source using an inductive circuit element (such as helical coil) positioned near-to, or immersed in, a discharge region [9,10].…”
Section: Introductionmentioning
confidence: 99%
“…A transformer model of its operation was developed in the 1930s [19], and it has been characterized extensively experimentally over the past few decades [20][21][22]. The cylindrical ICP has been introduced to number of applications, including as a plasma torch in the 1960s [23], which has been applied in materials processing for decades; for plasma propulsion [6]; and is often applied as a remote plasma source in atomic layer deposition [24,25].…”
Section: Introductionmentioning
confidence: 99%