2006
DOI: 10.1002/sia.2465
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Characterization of a passivation layer comprising MgOSiO2 and ZrO2

Abstract: Thin films with magnesium oxide (MgO) and silicon oxide (SiO 2 ) compounds mixed at various mixture ratios were deposited on flexible polyether sulfone (PES) substrates by an e-beam evaporator to investigate their potential for transparent barrier applications. In this study, as the MgO fraction increased, thin films comprising MgO and SiO 2 compounds became more amorphous, and their surface morphologies became smoother and denser. In addition, zirconium oxide (ZrO 2 ) was added to the above-mentioned compound… Show more

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Cited by 3 publications
(2 citation statements)
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“…Metal or inorganic films can function as superior oxygen and moisture barriers. 3 However, their fabrication involves an expensive manufacturing process, such as atomic layer deposition or chemical vapor deposition, which are not cost-effective and challenging for large-scale manufacture. 4 Moreover, requirements of flexibility, strong adhesion, and transparency strongly limit their use; hence, polymer-based materials are commonly used for gas barrier applications in functional devices.…”
mentioning
confidence: 99%
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“…Metal or inorganic films can function as superior oxygen and moisture barriers. 3 However, their fabrication involves an expensive manufacturing process, such as atomic layer deposition or chemical vapor deposition, which are not cost-effective and challenging for large-scale manufacture. 4 Moreover, requirements of flexibility, strong adhesion, and transparency strongly limit their use; hence, polymer-based materials are commonly used for gas barrier applications in functional devices.…”
mentioning
confidence: 99%
“…Highly efficient gas barrier materials are required for a wide variety of applications, from food and drug packaging to electronic displays, devices, and photovoltaic cells. , In particular, thin, flexible, and transparent coatings with excellent oxygen and moisture barrier properties are critical in photovoltaic modules and electronic devices, to ensure reliability and improve their life span. Metal or inorganic films can function as superior oxygen and moisture barriers . However, their fabrication involves an expensive manufacturing process, such as atomic layer deposition or chemical vapor deposition, which are not cost-effective and challenging for large-scale manufacture .…”
mentioning
confidence: 99%