2002
DOI: 10.1063/1.1435807
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Characterization of a high-density plasma produced by electrothermal capillary discharge

Abstract: The characteristics of a pulsed plasma jet originating from an electrothermal capillary discharge are reported from optical emission spectroscopy as well as from laser-induced fluorescence (LIF) measurement. The results show that the plasma temperature and electron density jump across the Mach disk. Their values are approximately 25 000 and 14 000 K downstream and upstream of the Mach disk, and the corresponding electron densities are about 1018 and 1017 cm−3, respectively. By applying the LIF imaging method i… Show more

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Cited by 20 publications
(11 citation statements)
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“…Six distinct atomic iron lines (Fe I: 340.4, 356.4, 403.3, 425.9, 518.8 and 539.7 nm) were used in the plasma jet to measure the electron temperature, and the Boltzmann plot method was employed assuming that the plasma is in local thermodynamic equilibrium [17]. Based on this, we calculate the electron density of the plasma jet with an iron atom (Fe I: 340.4 nm) and a univalent iron ion line (Fe II: 576.4 nm) by Saha equation.…”
Section: Resultsmentioning
confidence: 99%
“…Six distinct atomic iron lines (Fe I: 340.4, 356.4, 403.3, 425.9, 518.8 and 539.7 nm) were used in the plasma jet to measure the electron temperature, and the Boltzmann plot method was employed assuming that the plasma is in local thermodynamic equilibrium [17]. Based on this, we calculate the electron density of the plasma jet with an iron atom (Fe I: 340.4 nm) and a univalent iron ion line (Fe II: 576.4 nm) by Saha equation.…”
Section: Resultsmentioning
confidence: 99%
“…7 While many noncoherent sources have been designed with a half period discharge time in the range of 50-200 ns, 5,[8][9][10][11] even longer period capillary discharges are reported. 12 However less work has been presented in shorter period discharges. A common thread to applied research is obtaining options for a suitable source with line emission at 135 Å, given the pressing need for ultrafine scale lithography.…”
Section: Introductionmentioning
confidence: 98%
“…Some fundamental researches have been done by some scholars addressing these problems. Kohel et al [1] tested some parameters of the plasma jet using a radiation spectrometer; Wilson et al [2] established a theory model for the supersonic underexpanded plasma jet; Kim [3] and Kim et al [4,5] [20,21] studied the interaction characteristics of the plasma jet with the liquid in the cylindrical chamber and the cylindrical stepped chamber, respectively. On this basis, we have designed a simulating device to study the expansion and mixing properties of plasma jet in the liquid medium in this paper.…”
Section: Introductionmentioning
confidence: 99%