Electronics and Structures for MEMS II 2001
DOI: 10.1117/12.449161
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Characterization of a CMOS humidity sensor using different polyimides as sensing films

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“…Besides the humidity measurements, moisture measurements also are very important, such as in high voltage engineering for measurements of water content in transformer oils. At present, there are various types of humidity sensors available for humidity or moisture measurements, which can be categorized into capacity, resistive, gravimetric and mechanical types based on the sensing principles used [5,11,30,34]. Most of the humidity sensors need a layer of humidity sensitive material, such as polymers or hydrogels.…”
Section: Introductionmentioning
confidence: 99%
“…Besides the humidity measurements, moisture measurements also are very important, such as in high voltage engineering for measurements of water content in transformer oils. At present, there are various types of humidity sensors available for humidity or moisture measurements, which can be categorized into capacity, resistive, gravimetric and mechanical types based on the sensing principles used [5,11,30,34]. Most of the humidity sensors need a layer of humidity sensitive material, such as polymers or hydrogels.…”
Section: Introductionmentioning
confidence: 99%