Characterization and Integration Performance of Methyl Silsesquioxane-Based Nano Porous Low-k Dielectric Films

Choi, Eun-Mi; Nam, Minwoo; Areum, Kim; Kang, Kyungsik; Zheng, Lei; Hyeong, Kwon Soon; Pil, Yoon Sung; June, Hahn Sang; Kim, Soo-Kil; Son, Hyungbin; Gyu, Pyo Sung

doi:10.1166/jnn.2016.13482

j nanosci nanotechnol

2016

DOI: 10.1166/jnn.2016.13482

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Characterization and Integration Performance of Methyl Silsesquioxane-Based Nano Porous Low-k Dielectric Films

Eun-Mi Choi

Minwoo Nam

Kim Areum

et al.

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Characterization and Integration Performance of Methyl Silsesquioxane-Based Nano Porous Low-k Dielectric Films

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