2016
DOI: 10.1016/j.electacta.2016.02.040
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Characterization and application of a new pH sensor based on magnetron sputtered porous WO3 thin films deposited at oblique angles

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Cited by 43 publications
(38 citation statements)
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“…This type of sensor showed good stability in a pH range from 2 to 12, as well as selectivity and fast response time . More recent research showed the possibility of using sputter deposited columnar nanoporous WO 3 for fabrication of a full solid‐state pH sensor based on commercial screen printed electrodes which showed good stability and Nernstian behavior in a pH range from 1 to 12 . Development of flexible pH sensors for specific applications has recently become of great importance .…”
Section: Applicationsmentioning
confidence: 99%
“…This type of sensor showed good stability in a pH range from 2 to 12, as well as selectivity and fast response time . More recent research showed the possibility of using sputter deposited columnar nanoporous WO 3 for fabrication of a full solid‐state pH sensor based on commercial screen printed electrodes which showed good stability and Nernstian behavior in a pH range from 1 to 12 . Development of flexible pH sensors for specific applications has recently become of great importance .…”
Section: Applicationsmentioning
confidence: 99%
“…Eventually, some of the columns stop growing and the other ones only grow on the top [45][46][47][48]. The formed columns are titled toward the incident flux direction and can be sculptured into different morphologies, such as helices, inclined and vertical pillars (with variable diameter), zig-zags, and square spirals [49][50][51][52][53]. All these efforts make the GLAD technique excellent for design and device optimization for the development of sensors and optical devices, among others [45,[54][55][56][57][58].…”
Section: Introductionmentioning
confidence: 99%
“…This combination ensures the correct immobilization of the biological recognition element (cholesterol oxidase) and preserves its electrocatalytic activity. Magnetron Sputtering (MS) has been selected to fabricate the Pt electrode [14]. This physical vapour deposition technique is typically used for the fabrication of compact films, a feature that restricts the expected functionality with regard to biomolecules.…”
Section: Introductionmentioning
confidence: 99%
“…This physical vapour deposition technique is typically used for the fabrication of compact films, a feature that restricts the expected functionality with regard to biomolecules. An alternative to conventional MS consists of using an oblique angle deposition configuration (MS-OAD) where the substrate is placed at an oblique angle with respect to the target [14][15][16][17][18][19][20][21][22]. This deposition geometry leads to the formation columnar and highly porous microstructure with mesopores extending from the surface of the film up to the interface with the substrate [18,21].…”
Section: Introductionmentioning
confidence: 99%