Characterization and absolute QE measurements of delta-doped N-channel and P-channel CCDs

Jacquot, Blake C.; Monacos, Steve; Jones, Todd J.; Blacksberg, Jordana; Hoenk, Michael E.; Nikzad, Shouleh

doi:10.1117/12.857694

Cited by 6 publications

(8 citation statements)

References 7 publications

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“…At higher wavelengths or lower photon energies, the QY is approximately unity, and at wavelengths shorter than 360 nm 19 , this number is qualitatively proportional to the incident photon energies. This proportionality has been modeled and measured for higher photon energies including x-rays and has been reported for silicon by different groups as a constant number or as a function of incident photon energy [15,[19][20][21]. A detailed discussion can be found elsewhere [16,20,22].…”

Section: Resultsmentioning

confidence: 99%

“…The uncoated region QE is in good agreement with the silicon transmittance data within the uncertainties of measurements. [12,16] The QY method used to determine the true QE, (i.e., fraction of photons detected) was direct measurement at each wavelength in our laboratory using the photon transfer technique [15,21]. of incident photons using two different QY sets of values to correct and normalize for multiple electrons per photon in the measured signal.…”

Section: Resultsmentioning

confidence: 99%

“…Devices were characterized in a fully calibrated vacuum UV system equipped with a vacuum monochrometer, two sources of deuterium and tungsten allowing characterization from 120-700 nm, a differentially pumped device chamber, and National Institute of Standards and Technology (NIST)-calibrated photodiodes for flux measurements. Details of this characterization system are described elsewhere [15,16].…”

Section: Methodsmentioning

confidence: 99%

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Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications

et al. 2012

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We have used molecular beam epitaxy (MBE) based delta-doping technology to demonstrate nearly 100% internal quantum efficiency (QE) on silicon electron-multiplied charge-coupled devices (EMCCDs) for single photon counting detection applications. We used atomic layer deposition (ALD) for antireflection (AR) coatings and achieved atomic-scale control over the interfaces and thin film materials parameters. By combining the precision control of MBE and ALD, we have demonstrated more than 50% external QE in the far and near ultraviolet in megapixel arrays. We have demonstrated that other important device performance parameters such as dark current are unchanged after these processes. In this paper, we briefly review ultraviolet detection, report on these results, and briefly discuss the techniques and processes employed.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

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Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications

et al. 2012

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“…Numerical simulations now predict that significant IGM gas accretion in cold (~10 4-5 K) flows fuels galaxy formation and on-going star formation in the early universe, perhaps extending to z=0 [9]. Amazingly, it is estimated that ~80% of the gravitational potential energy dissipated by the accreting gas may be radiated as Ly !…”

Section: ) Filament Correlationsmentioning

confidence: 99%

FIREBALL: the Faint Intergalactic medium Redshifted Emission Balloon: overview and first science flight results

et al. 2010

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FIREBALL (the Faint Intergalactic Redshifted Emission Balloon) is a balloon-borne 1m telescope coupled to an ultraviolet fiber-fed spectrograph. FIREBALL is designed to study the faint and diffuse emission of the intergalactic medium, until now detected primarily in absorption. FIREBALL is a path finding mission to test new technology and make new constraints on the temperature and density of this gas. We report on the first successful science flight of FIREBALL, in June 2009, which proved every aspect of the complex instrument performance, and provided the strongest measurements and constraints on IGM emission available from any instrument.

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“…Antimony layers about 5 nm thick were applied in this way to 2k×4k and 1k×1k LBNL CCD's similar to those described here [64,65]. QE measurements with and without a (nominally) Si 3 N 4 /SiO 2 AR coating are shown in Ref.…”

Section: Prospects For Qe Improvementmentioning

confidence: 99%

Quantum efficiency modeling for a thick back-illuminated astronomical CCD

Groom

Haque

Holland

et al. 2017

Journal of Applied Physics

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The quantum efficiency and reflectivity of thick, back-illuminated CCD's being fabricated at LBNL for astronomical applications are modeled and compared with experiment. The treatment differs from standard thin-film optics in that (a) absorption is permitted in any film, (b) the 200-500 µm thick silicon substrate is considered as a thin film in order to observe the fringing behavior at long wavelengths, and (c) by using approximate boundary conditions, absorption in the surface films is separated from absorption in the substrate. For the quantum efficiency measurements the CCD's are normally operated as CCD's, usually at T = −140• C, and at higher temperatures as photodiodes. They are mounted on mechanical substrates. Reflectivity is measured on air-backed wafer samples at room temperature. The agreement between model expectation and quantum efficiency measurement is in general satisfactory. * degroom@lbl.gov 2

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Characterization and absolute QE measurements of delta-doped N-channel and P-channel CCDs

Cited by 6 publications

References 7 publications

Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications

Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications

FIREBALL: the Faint Intergalactic medium Redshifted Emission Balloon: overview and first science flight results

Quantum efficiency modeling for a thick back-illuminated astronomical CCD

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