Characterization, Analysis and Modeling of a MEMS Based Nitinolactuator

Abstract

The paper presents the modeling and simulation of a Nitinol based microactuator for evaluation of the characteristics of this microactuator. The displacement, pressure, stress and von mises stress characteristics are presented and verified using COMSOL Multiphysics 4.4.The characterization of these parameters proves to be useful in the development of the design of these smart actuators exhibiting shape memory effect. The resistivity of Nitinol is suitable for Joules Heating. Therefore microactuator in this current study is of dimensions 1000×600×200µm is characterized at different temperature during the martensitic and austenitic phase transformation.