Characteristics of Li-ion micro batteries fully batch fabricated by micro-fluidic MEMS packaging

Hahn, Robert W.; Ferch, M.; Kyeremateng, Nana Amponsah; Hoeppner, Katrin; Marquardt, Krystan; Elia, Giuseppe Antonio

doi:10.1007/s00542-018-3933-z

Cited by 5 publications

(8 citation statements)

References 15 publications

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“…For the interdigitated design, the width of the electrode affects the performance as a large width may increase the resistance. The loading of electrode material is larger than those created by deposition tools, [46][47] and therefore the capacity of the printed microbattery can reach about hundreds of microampere hours (Figure 5f). [47] However, the printing nozzle sets the minimum width of the [21] Copyright 2019, American Chemical Society.…”

Section: Interdigitated Microelectrodes On the Substrate Surfacementioning

confidence: 99%

Section: Interdigitated Microelectrodes On the Substrate Surfacementioning

confidence: 99%

“…The loading of electrode material is larger than those created by deposition tools, [ 46–47 ] and therefore the capacity of the printed microbattery can reach about hundreds of microampere hours (Figure 5f). [ 47 ] However, the printing nozzle sets the minimum width of the electrodes making it difficult to shrink the footprint area. As a result, despite their high capacity, such microbatteries occupy a large surface area ranging from 9 to 50 mm 2 , leading to a compromised footprint capacity (≈0.6 to 1 mAh cm −2 ) and thus failing to show a significant advantage over the battery stack design on the chip.…”

Section: On‐chip Technologies To Construct Tiny Batteriesmentioning

confidence: 99%

“…The loading of electrode material is larger than those created by deposition tools, [46][47] and therefore the capacity of the printed microbattery can reach about hundreds of microampere hours (Figure 5f). [47] However, the printing nozzle sets the minimum width of the [21] Copyright 2019, American Chemical Society. (a) Reproduced with permission.…”

Section: Interdigitated Microelectrodes On the Substrate Surfacementioning

confidence: 99%

mentioning

confidence: 99%

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On‐Chip Batteries for Dust‐Sized Computers

Zhu

Bandari

et al. 2022

Advanced Energy Materials

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are thus able to "walk" inside of everything to develop ubiquitous computing. In fact, in 2013, the computer size was reduced to 1 cubic millimeter (Figure 1a). [3] It was constructed by stacking dust-sized chips, including a central processing unit, a memory, a power management circuit, and a timer (Figure 1b) into a rectangular-shaped pile. End users can create a sensor system by adding an application layer, a temperature sensor for instance. A photovoltaic (PV) cell was placed in the top layer (layer 1) to harvest energy, and a microbattery was installed in layer 2 for energy storage. The size of the microbattery measured 1.1×1.69 mm 2 with a thickness of 150 µm. A computer with a similar structure and functionality but much smaller in size was developed in 2018 (Figure 1c). [4] The volume of only 0.04 mm 3 allows for a highly localized measurement of the cellular temperature, thus providing an accurate indicator of cellular metabolism. While these lab-level demonstrations show the future of ubiquitous computing, dustsized computers will only become a new class of computing platforms if they are available anywhere anytime, relying on energy-autonomous operation.The key challenge to realizing perpetual operation is the development of sub-millimeter-scale energy harvesters and storage devices. [2,5] Micro-thermoelectric generators convert heat into electricity, but their output power is too low to drive dust-sized chips. [6] Radiofrequency (RF) power converters suffer from low efficiency when reducing antenna sizes. PV Advances in microelectronics have enabled the use of miniaturized computers for autonomous intelligence at the size of a dust particle less than one square millimeter across and a few hundred micrometers thick, creating an environment for ubiquitous computing. However, the size mismatch between microbatteries and microelectronics has emerged as a fundamental barrier against the take-off of tiny intelligent systems requiring power anytime anywhere. Mainstream microbattery structures include stacked thin films on the chip or electrode pillars and on-chip interdigitated microelectrodes. Nevertheless, available technologies cannot shrink the footprint area of batteries while maintaining adequate energy storage. Alternatively, the on-chip self-assembly process known as micro-origami is capable of winding stacked thin films into Swiss-roll structures to reduce the footprint area, which exactly mimics the manufacture of the most successful full-sized batteries-cylinder batteries. In addition to discussing in detail the technical difficulties of reducing the size of on-chip microbatteries with various structures and potential solutions, this Perspective highlights the following two basic requirements for eventual integration in microcomputers: minimum energy density of 100 microwatt-hour per square centimeter and monolithic integration with other functional electric circuits on the chip.

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Section: Interdigitated Microelectrodes On the Substrate Surfacementioning

confidence: 99%

Section: Interdigitated Microelectrodes On the Substrate Surfacementioning

confidence: 99%

Section: On‐chip Technologies To Construct Tiny Batteriesmentioning

confidence: 99%

Section: Interdigitated Microelectrodes On the Substrate Surfacementioning

confidence: 99%

mentioning

confidence: 99%

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On‐Chip Batteries for Dust‐Sized Computers

Zhu

Bandari

et al. 2022

Advanced Energy Materials

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A Sub‐Square‐Millimeter Microbattery with Milliampere‐Hour‐Level Footprint Capacity

Zhu

Yin

et al. 2022

Advanced Energy Materials

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As substantial progress has been made to miniaturize intelligent microsystems to the sub‐square‐millimeter scale, there is a desperate need to move beyond existing microbattery technologies to offer adequate energy at the same footprint. A micro‐origami technology able to wind up a flat layer stack into a Swiss roll presents a promising approach in this regard because it mimics the most successful way to make energy‐dense full‐sized batteries. Here, an on‐chip Swiss‐roll current collector made via the micro‐origami process is developed and it is infused with a MnO2 slurry comprising a zincophilic binder. The zincophilic binder layer enhances zinc ion transportability and suppresses MnO2 dissolution. The MnO2 Swiss‐roll microelectrode is used to create an on‐chip microbattery with a small electrode footprint area of 0.75 mm2, which shows a footprint capacity up to 3.3 mAh cm–2. The microbattery demonstrates a reversible capacity of more than 1 mAh cm–2 for 150 cycles. The battery stability can be improved to over 600 cycles at a 50% depth of discharge. An on‐chip integration of a microsystem with the microbattery is demonstrated. The microbatteries set foot in the untrodden sub‐square‐millimeter area providing adequate energy for ever more miniaturized intelligent microsystems.

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Advances in Microfluidic Technologies for Energy Storage and Release Systems

Cheng

Meena

et al. 2022

Adv Energy and Sustain Res

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While the majority of the technologies developed for energy storage are macrosized, the reactions involved in energy storage, such as diffusion, ionic transport, and surface‐based reactions, occur on the microscale. In light of this, microfluidics with the ability to manipulate such reactions and fluids on the micrometer scale has emerged as an interesting platform for the development of energy storage systems. Herein, the advances in utilizing microfluidic technologies in energy storage and release systems are reviewed in terms of four aspects. First, miniaturized microfluidic devices to store various forms of energy such as electrochemical, biochemical, and solar energy with unique architectures and enhanced performances are discussed. Second, novel energy materials with the desired geometries and characteristics that can be fabricated via microfluidic techniques are reviewed. Third, applications enabled by such microfluidic energy storage and release systems, particularly focusing on medical, environmental, and modeling purposes, are presented. Lastly, some remaining problems and challenges and possible future works in this field are suggested.

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Characteristics of Li-ion micro batteries fully batch fabricated by micro-fluidic MEMS packaging

Cited by 5 publications

References 15 publications

On‐Chip Batteries for Dust‐Sized Computers

On‐Chip Batteries for Dust‐Sized Computers

A Sub‐Square‐Millimeter Microbattery with Milliampere‐Hour‐Level Footprint Capacity

Advances in Microfluidic Technologies for Energy Storage and Release Systems

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