Characteristics of lead zirconate titanate ferroelectric thick films from a screen-printing laser transfer method

Abstract

Microstructures and electrical properties of lead zirconate titanate (PZT) thick films made by using a screen-printing laser transfer method have been studied. The PZT thick-film elements were first screen printed on a sapphire substrate and sintered at 1150to1250°C. Then they were bonded to a target substrate such as silicon and released from the sapphire by means of an excimer laser exposure from the backside of the sapphire substrate. This approach makes it possible to obtain highly densified films because there is less limitation on sintering conditions, and allows integrating patterned PZT thick films onto many kinds of substrates. The thick films have dielectric constants of 1397 to 1675, remnant polarization of 32to35μC∕cm2, a piezoelectric constant d31 of about −124pm∕V, and Young’s modulus Y11E(59.4GPa) of almost the same as the corresponding bulk ceramic.

Electrophoretic deposition of Ba0.77Ca0.23TiO3 nanopowders

“…The main advantage of this method, compared to the traditional solid state reaction method, is the better control of the stoichiometry, high purity, easy dopant incorporation, and formation of nanometric particles with controlled particle size (Silva et al, 2006(Silva et al, , 2007. Research on ferroelectric and piezoelectric thick films (thickness above 10 m) is fundamental for the development of microelectromechanical systems (MEMS) due to its higher sensitivity, larger mechanical force and broader working frequency range compared to thin films (Xu et al, 2005). The electrophoretic deposition (EPD) is an effective technique that allows the shaping of free standing objects, and also to deposit thick films on substrates, starting from liquid suspensions of nanometer sized powders that can be deposited through the application of direct current (DC) potentials.…”

Laser-transfer processing of functional ceramic films

“…The inherent porosity in the hybrid sol-gel PZT film is thought to explain the lower laser fluence, 250 mJ/cm 2 , necessary for delamination of a PZT film from sapphire, compared to literature values of 400-700 mJ/cm 2 . [6][7][8] Even though this increase in laser energy density may be partially explained by small variations in wavelength of radiation used Fig. 6.…”

Sinterização de filmes espessos de Ba(Ti0,85Zr0,15)O3 por varredura laser

“…Materiais ferroelétricos produzidos na forma de filmes espessos (>10 µm de espessura) têm sido utilizados em transformadores de impedância, micro-atuadores, sensores piezelétricos [7][8][9] e no desenvolvimento de MEMS (microelectromechanical systems) devido a sua alta sensibilidade e amplo intervalo de freqüência de trabalho quando comparados aos filmes finos [8,9]. Entre os materiais viáveis para estas aplicações, o Ba(Ti 1-x Zr x )O 3 é um dos candidatos por apresentar propriedades elétricas sintonizáveis com alterações na quantidade de Zr na composição química das cerâmicas [10,11].…”